| Original language | Undefined |
|---|---|
| Place of Publication | Ede |
| Publication status | Published - 26 Nov 1993 |
Keywords
- METIS-117982
Stiction of surface micromachined structures after rinsing and drying
Research output: Other contribution › Other research output
Research output: Other contribution › Other research output
| Original language | Undefined |
|---|---|
| Place of Publication | Ede |
| Publication status | Published - 26 Nov 1993 |