Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

R. Legtenberg, J. Elders, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publication7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)
    Place of PublicationYokohama, Japan
    Pages198-201
    Publication statusPublished - 7 Jun 1993

    Keywords

    • METIS-130299

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