Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

R. Legtenberg, J. Elders, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)
Place of Publication	Yokohama, Japan
Pages	198-201
Publication status	Published - 7 Jun 1993

Keywords

@inproceedings{d8cf7d5d3a5144608330119443319b92,

title = "Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms",

keywords = "METIS-130299",

author = "R. Legtenberg and J. Elders and Elwenspoek, {Michael Curt}",

year = "1993",

month = jun,

day = "7",

language = "Undefined",

pages = "198--201",

booktitle = "7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)",

}

7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93). Yokohama, Japan, 1993. p. 198-201.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms

AU - Legtenberg, R.

AU - Elders, J.

AU - Elwenspoek, Michael Curt

PY - 1993/6/7

Y1 - 1993/6/7

KW - METIS-130299

M3 - Conference contribution

SP - 198

EP - 201

BT - 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93)

CY - Yokohama, Japan

ER -