Original language | Undefined |
---|---|
Title of host publication | 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93) |
Place of Publication | Yokohama, Japan |
Pages | 198-201 |
Publication status | Published - 7 Jun 1993 |
Keywords
- METIS-130299
R. Legtenberg, J. Elders, Michael Curt Elwenspoek
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
Original language | Undefined |
---|---|
Title of host publication | 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93) |
Place of Publication | Yokohama, Japan |
Pages | 198-201 |
Publication status | Published - 7 Jun 1993 |