Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise

H. Droogendijk; Meint J. de Boer; Robert Anton Brookhuis; Remco G.P. Sanders; Gijsbertus J.M. Krijnen

doi:10.1109/Transducers.2013.6627115

Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise

H. Droogendijk, Meint J. de Boer, Robert Anton Brookhuis, Remco G.P. Sanders, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

1 Citation (Scopus)

4 Downloads (Pure)

Abstract

We demonstrate that, using stochastic resonance (SR) in a voltage-controlled MEMS-slider, the signal-to-noise ratio can be increased by adding white noise. Using a Silicon-on-Insulator (SOI) based process, we realised a slider structure with periodic capacitive structures to obtain tunable unstable regions. We implemented stochastic resonance by controlling the strength of these capacitive wells by a DC-bias voltage, operating the device in push-pull mode by electrostatic actuation and adding a judiciously amount of white noise to one of the actuation comb drives. We show that this SR scheme allows for detection of sub-threshold forces, with application in e.g. SOI-based accelerometers.

Original language	Undefined
Title of host publication	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
Place of Publication	USA
Publisher	IEEE
Pages	1707-1710
Number of pages	4
ISBN (Print)	978-1-4673-5983-2
DOIs	https://doi.org/10.1109/Transducers.2013.6627115
Publication status	Published - 2013
Event	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://www.transducers-eurosensors2013.org/

Publication series

Name
Publisher	IEEE Electron Devices Society

Conference

Conference	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
Abbreviated title	TRANSDUCERS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13
Other	Held in conjunction with EUROSENSORS XXVII
Internet address	http://www.transducers-eurosensors2013.org/

Keywords

TST-Life like
slider
EWI-23447
Noise
METIS-299970
energy function
electrostatic
sub-threshold
IR-87465
Stochastic resonance

Access to Document

10.1109/Transducers.2013.6627115

http://eprints.eemcs.utwente.nl/secure2/23447/01/430_0414.pdf

Cite this

Droogendijk, H., de Boer, M. J., Brookhuis, R. A., Sanders, R. G. P., & Krijnen, G. J. M. (2013). Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 (pp. 1707-1710). IEEE. https://doi.org/10.1109/Transducers.2013.6627115

@inproceedings{fefe07c8eda34d0e99fd1d1c48f40518,

title = "Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise",

abstract = "We demonstrate that, using stochastic resonance (SR) in a voltage-controlled MEMS-slider, the signal-to-noise ratio can be increased by adding white noise. Using a Silicon-on-Insulator (SOI) based process, we realised a slider structure with periodic capacitive structures to obtain tunable unstable regions. We implemented stochastic resonance by controlling the strength of these capacitive wells by a DC-bias voltage, operating the device in push-pull mode by electrostatic actuation and adding a judiciously amount of white noise to one of the actuation comb drives. We show that this SR scheme allows for detection of sub-threshold forces, with application in e.g. SOI-based accelerometers.",

keywords = "TST-Life like, slider, EWI-23447, Noise, METIS-299970, energy function, electrostatic, sub-threshold, IR-87465, Stochastic resonance",

author = "H. Droogendijk and {de Boer}, {Meint J.} and Brookhuis, {Robert Anton} and Sanders, {Remco G.P.} and Krijnen, {Gijsbertus J.M.}",

year = "2013",

doi = "10.1109/Transducers.2013.6627115",

language = "Undefined",

isbn = "978-1-4673-5983-2",

publisher = "IEEE",

pages = "1707--1710",

booktitle = "17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013",

address = "United States",

note = "17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

url = "http://www.transducers-eurosensors2013.org/",

}

Droogendijk, H, de Boer, MJ, Brookhuis, RA, Sanders, RGP & Krijnen, GJM 2013, Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise. in 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013. IEEE, USA, pp. 1707-1710, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627115

Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise. / Droogendijk, H.; de Boer, Meint J.; Brookhuis, Robert Anton et al.
17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013. USA: IEEE, 2013. p. 1707-1710.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise

AU - Droogendijk, H.

AU - de Boer, Meint J.

AU - Brookhuis, Robert Anton

AU - Sanders, Remco G.P.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 17

PY - 2013

Y1 - 2013

N2 - We demonstrate that, using stochastic resonance (SR) in a voltage-controlled MEMS-slider, the signal-to-noise ratio can be increased by adding white noise. Using a Silicon-on-Insulator (SOI) based process, we realised a slider structure with periodic capacitive structures to obtain tunable unstable regions. We implemented stochastic resonance by controlling the strength of these capacitive wells by a DC-bias voltage, operating the device in push-pull mode by electrostatic actuation and adding a judiciously amount of white noise to one of the actuation comb drives. We show that this SR scheme allows for detection of sub-threshold forces, with application in e.g. SOI-based accelerometers.

AB - We demonstrate that, using stochastic resonance (SR) in a voltage-controlled MEMS-slider, the signal-to-noise ratio can be increased by adding white noise. Using a Silicon-on-Insulator (SOI) based process, we realised a slider structure with periodic capacitive structures to obtain tunable unstable regions. We implemented stochastic resonance by controlling the strength of these capacitive wells by a DC-bias voltage, operating the device in push-pull mode by electrostatic actuation and adding a judiciously amount of white noise to one of the actuation comb drives. We show that this SR scheme allows for detection of sub-threshold forces, with application in e.g. SOI-based accelerometers.

KW - TST-Life like

KW - slider

KW - EWI-23447

KW - Noise

KW - METIS-299970

KW - energy function

KW - electrostatic

KW - sub-threshold

KW - IR-87465

KW - Stochastic resonance

U2 - 10.1109/Transducers.2013.6627115

DO - 10.1109/Transducers.2013.6627115

M3 - Conference contribution

SN - 978-1-4673-5983-2

SP - 1707

EP - 1710

BT - 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013

PB - IEEE

CY - USA

T2 - 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013

Y2 - 16 June 2013 through 20 June 2013

ER -