Stochastic resonance in a voltage-controlled MEMS-slider: increasing the signal-to-noise ratio with noise

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    Abstract

    We demonstrate that, using stochastic resonance (SR) in a voltage-controlled MEMS-slider, the signal-to-noise ratio can be increased by adding white noise. Using a Silicon-on-Insulator (SOI) based process, we realised a slider structure with periodic capacitive structures to obtain tunable unstable regions. We implemented stochastic resonance by controlling the strength of these capacitive wells by a DC-bias voltage, operating the device in push-pull mode by electrostatic actuation and adding a judiciously amount of white noise to one of the actuation comb drives. We show that this SR scheme allows for detection of sub-threshold forces, with application in e.g. SOI-based accelerometers.
    Original languageUndefined
    Title of host publication17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
    Place of PublicationUSA
    PublisherIEEE Electron Devices Society
    Pages1707-1710
    Number of pages4
    ISBN (Print)978-1-4673-5983-2
    DOIs
    Publication statusPublished - 2013
    Event17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain
    Duration: 16 Jun 201320 Jun 2013
    Conference number: 17
    http://www.transducers-eurosensors2013.org/

    Publication series

    Name
    PublisherIEEE Electron Devices Society

    Conference

    Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
    Abbreviated titleTRANSDUCERS 2013
    CountrySpain
    CityBarcelona
    Period16/06/1320/06/13
    OtherHeld in conjunction with EUROSENSORS XXVII
    Internet address

    Keywords

    • TST-Life like
    • slider
    • EWI-23447
    • Noise
    • METIS-299970
    • energy function
    • electrostatic
    • sub-threshold
    • IR-87465
    • Stochastic resonance

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