Abstract
We present the use of stochastic resonance in a MEMSslider
for improvement of its sensing capability. Using
a Silicon-on-Insulator (SOI) based process local instabilities
can be realized by designing suitable geometries
for capacitive structures. By controlling the strength of
these capacitive wells by a DC voltage and adding a particular
level of noise, exploiting the effect of stochastic
resonance (SR) it is expected to be possible to detect
sub-threshold forces.
Original language | English |
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Title of host publication | Sense of Contact 13 |
Place of Publication | Utrecht, the Netherlands |
Publisher | STW |
Number of pages | 2 |
Publication status | Published - Apr 2011 |
Event | 13th Sensor Technology Conference Sense of Contact 2011 - Conferentiecentrum Woudschoten, Zeist, Netherlands Duration: 7 Apr 2011 → 7 Apr 2011 Conference number: 13 |
Workshop
Workshop | 13th Sensor Technology Conference Sense of Contact 2011 |
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Country/Territory | Netherlands |
City | Zeist |
Period | 7/04/11 → 7/04/11 |
Other | 6 Apr 2011 |
Keywords
- Stochastic resonance
- Slider
- Translational
- TST-Life like
- Electrostatic