Stochastic Resonance in an Electrostatically Controlled MEMS-slider

H. Droogendijk, Meint J. de Boer, Gijsbertus J.M. Krijnen

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    We present the use of stochastic resonance in a MEMSslider for improvement of its sensing capability. Using a Silicon-on-Insulator (SOI) based process local instabilities can be realized by designing suitable geometries for capacitive structures. By controlling the strength of these capacitive wells by a DC voltage and adding a particular level of noise, exploiting the effect of stochastic resonance (SR) it is expected to be possible to detect sub-threshold forces.
    Original languageEnglish
    Title of host publicationSense of Contact 13
    Place of PublicationUtrecht, the Netherlands
    Number of pages2
    Publication statusPublished - Apr 2011
    Event13th Sensor Technology Conference Sense of Contact 2011 - Conferentiecentrum Woudschoten, Zeist, Netherlands
    Duration: 7 Apr 20117 Apr 2011
    Conference number: 13


    Workshop13th Sensor Technology Conference Sense of Contact 2011
    Other6 Apr 2011


    • Stochastic resonance
    • Slider
    • Translational
    • TST-Life like
    • Electrostatic


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