Strengthening ultrathin Si3N4 membranes by compressive surface stress

Airat Shafikov*, Bart Schurink, Robbert W.E. van de Kruijs, J.P.H. Benschop, Wesley van den Beld, Silvester Houweling, F. Bijkerk

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

9 Citations (Scopus)
178 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Strengthening ultrathin Si3N4 membranes by compressive surface stress'. Together they form a unique fingerprint.

Material Science

Engineering