Stress and birefringence in PECVD SiOxNy waveguides

T. Bearda, R.M. de Ridder, Kerstin Worhoff, Paul Lambeck, H. Albers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageEnglish
Title of host publicationProceedings of 1996 IEEE/LEOS Symposium
Place of PublicationEnschede
Pages222-225
Publication statusPublished - 28 Nov 1996
EventIEEE/LEOS Symposium Benelux Chapter 1996 - University of Twente, Enschede, Netherlands
Duration: 28 Nov 199628 Nov 1996

Conference

ConferenceIEEE/LEOS Symposium Benelux Chapter 1996
CountryNetherlands
CityEnschede
Period28/11/9628/11/96

Keywords

  • METIS-112737

Cite this

Bearda, T., de Ridder, R. M., Worhoff, K., Lambeck, P., & Albers, H. (1996). Stress and birefringence in PECVD SiOxNy waveguides. In Proceedings of 1996 IEEE/LEOS Symposium (pp. 222-225). Enschede.