We present stress measurements on Co50/Ni50/Pt multilayers which have been sputtered at several argon and base pressures and the stack composition of which has been changed.
- SMI-TST: From 2006 in EWI-TST
- SMI-MAT: MATERIALS
M.D. Bijker*, W.P. van Drent, J.C. Lodder
Research output: Contribution to journal › Article › Academic › peer-review