Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications

F. Ay, C.G.H. Roeloffzen, A. Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    6 Citations (Scopus)
    Original languageUndefined
    Title of host publicationLEOS, IEEE 13th Annual Meeting Conference Proceedings
    Place of PublicationPuerto Rico
    Pages760-761
    Number of pages2
    Publication statusPublished - 16 Nov 2000

    Keywords

    • METIS-114063

    Cite this

    Ay, F., Roeloffzen, C. G. H., & Driessen, A. (2000). Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications. In LEOS, IEEE 13th Annual Meeting Conference Proceedings (pp. 760-761). Puerto Rico.
    Ay, F. ; Roeloffzen, C.G.H. ; Driessen, A. / Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications. LEOS, IEEE 13th Annual Meeting Conference Proceedings. Puerto Rico, 2000. pp. 760-761
    @inproceedings{cc786ea0b1684c4b9b141ee36fadb44c,
    title = "Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications",
    keywords = "METIS-114063",
    author = "F. Ay and C.G.H. Roeloffzen and A. Driessen",
    year = "2000",
    month = "11",
    day = "16",
    language = "Undefined",
    isbn = "1092-8081",
    pages = "760--761",
    booktitle = "LEOS, IEEE 13th Annual Meeting Conference Proceedings",

    }

    Ay, F, Roeloffzen, CGH & Driessen, A 2000, Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications. in LEOS, IEEE 13th Annual Meeting Conference Proceedings. Puerto Rico, pp. 760-761.

    Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications. / Ay, F.; Roeloffzen, C.G.H.; Driessen, A.

    LEOS, IEEE 13th Annual Meeting Conference Proceedings. Puerto Rico, 2000. p. 760-761.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications

    AU - Ay, F.

    AU - Roeloffzen, C.G.H.

    AU - Driessen, A.

    PY - 2000/11/16

    Y1 - 2000/11/16

    KW - METIS-114063

    M3 - Conference contribution

    SN - 1092-8081

    SP - 760

    EP - 761

    BT - LEOS, IEEE 13th Annual Meeting Conference Proceedings

    CY - Puerto Rico

    ER -

    Ay F, Roeloffzen CGH, Driessen A. Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications. In LEOS, IEEE 13th Annual Meeting Conference Proceedings. Puerto Rico. 2000. p. 760-761