Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications

F. Ay, C.G.H. Roeloffzen, A. Driessen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	LEOS, IEEE 13th Annual Meeting Conference Proceedings
Place of Publication	Puerto Rico
Pages	760-761
Number of pages	2
Publication status	Published - 16 Nov 2000

Keywords

@inproceedings{cc786ea0b1684c4b9b141ee36fadb44c,

title = "Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications",

keywords = "METIS-114063",

author = "F. Ay and C.G.H. Roeloffzen and A. Driessen",

year = "2000",

month = nov,

day = "16",

language = "Undefined",

isbn = "1092-8081",

pages = "760--761",

booktitle = "LEOS, IEEE 13th Annual Meeting Conference Proceedings",

}