Structural and Loss Characterization of SiON Layers for Optical Waveguide Applications

F. Ay, C.G.H. Roeloffzen, A. Driessen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    7 Citations (Scopus)
    Original languageUndefined
    Title of host publicationLEOS, IEEE 13th Annual Meeting Conference Proceedings
    Place of PublicationPuerto Rico
    Number of pages2
    Publication statusPublished - 16 Nov 2000


    • METIS-114063

    Cite this