Structural and reflective characteristics of multilayers for 6.x nm wavelength

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

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Abstract

The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • Louis, Eric , Co-Supervisor
Award date31 Oct 2013
Place of PublicationEnschede
Publisher
Print ISBNs978-94-6191-912-0
Publication statusPublished - 31 Oct 2013

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theses
mirrors
photolithography
wavelengths
optics
reflectance
physics

Keywords

  • IR-87559
  • METIS-298275

Cite this

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title = "Structural and reflective characteristics of multilayers for 6.x nm wavelength",
abstract = "The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.",
keywords = "IR-87559, METIS-298275",
author = "Makhotkin, {Igor Alexandrovich}",
note = "premie 100{\%} LPNO",
year = "2013",
month = "10",
day = "31",
language = "English",
isbn = "978-94-6191-912-0",
publisher = "Universiteit Twente",
school = "University of Twente",

}

Structural and reflective characteristics of multilayers for 6.x nm wavelength. / Makhotkin, Igor Alexandrovich.

Enschede : Universiteit Twente, 2013. 104 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

TY - THES

T1 - Structural and reflective characteristics of multilayers for 6.x nm wavelength

AU - Makhotkin, Igor Alexandrovich

N1 - premie 100% LPNO

PY - 2013/10/31

Y1 - 2013/10/31

N2 - The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.

AB - The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.

KW - IR-87559

KW - METIS-298275

M3 - PhD Thesis - Research external, graduation UT

SN - 978-94-6191-912-0

PB - Universiteit Twente

CY - Enschede

ER -