Structural and reflective characteristics of multilayers for 6.x nm wavelength

Igor Alexandrovich Makhotkin

doi:10.3990/1.9789461919120

Structural and reflective characteristics of multilayers for 6.x nm wavelength

Igor Alexandrovich Makhotkin

Research output: Thesis › PhD Thesis - Research external, graduation UT

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Abstract

The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor Louis, Eric, Co-Supervisor
Award date	31 Oct 2013
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-94-6191-912-0
DOIs	https://doi.org/10.3990/1.9789461919120
Publication status	Published - 31 Oct 2013

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title = "Structural and reflective characteristics of multilayers for 6.x nm wavelength",

abstract = "The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.",

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N2 - The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.

AB - The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.

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DO - 10.3990/1.9789461919120

M3 - PhD Thesis - Research external, graduation UT

SN - 978-94-6191-912-0

PB - University of Twente

CY - Enschede

ER -

Structural and reflective characteristics of multilayers for 6.x nm wavelength

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