The physics investigations described in this thesis have been inspired by the perspective of the application of La/B-based multilayer mirrors in photolithography. This perspective however, demands the highest possible reflectance of the mirrors and full control over the multilayer growth process. The corresponding research in this thesis therefore covers the following topics: a theoretical and experimental analysis of the spectral properties of La/B-based multilayer stacks, an experimental layer composition and growth study of the candidate La/B-based multilayer optics, and the development of techniques to enable characterization of the internal structure of such multilayers.
|Award date||31 Oct 2013|
|Place of Publication||Enschede|
|Publication status||Published - 31 Oct 2013|