Structural properties of sub nanometer thick layers to enhance EUV multilayer mirror reflectance

J. Bosgra, Robbert Wilhelmus Elisabeth van de Kruijs, E. Zoethout, J. Verhoeven, Andrey Yakshin, Frederik Bijkerk

Research output: Other contribution › Other research output

Fingerprint

Dive into the research topics of 'Structural properties of sub nanometer thick layers to enhance EUV multilayer mirror reflectance'. Together they form a unique fingerprint.

Physics

Material Science