This PhD thesis contains a selection of thin film research results on the structure control of La/B multilayer mirrors with nm- and sub nm-thick layers, used at normal and grazing incidence of XUV radiation. Topics investigated include an improvement of the optical layer contrast, the reflectivity at 6.x nm wavelength, and the thermal stability. The approaches presented deal with in situ growth studies, deposition control and high resolution X-ray analysis.
|Award date||8 Nov 2018|
|Place of Publication||Enschede|
|Publication status||Published - 8 Nov 2018|