Structure control of La/B multilayer systems by partial nitridation

Dmitry S. Kuznetsov

doi:10.3990/1.9789036546546

Structure control of La/B multilayer systems by partial nitridation

Dmitry S. Kuznetsov

XUV Optics

Research output: Thesis › PhD Thesis - Research UT, graduation UT

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Abstract

This PhD thesis contains a selection of thin film research results on the structure control of La/B multilayer mirrors with nm- and sub nm-thick layers, used at normal and grazing incidence of XUV radiation. Topics investigated include an improvement of the optical layer contrast, the reflectivity at 6.x nm wavelength, and the thermal stability. The approaches presented deal with in situ growth studies, deposition control and high resolution X-ray analysis.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor Yakshin, Andrey, Co-Supervisor
Award date	8 Nov 2018
Place of Publication	Enschede
Publisher	University of Twente
Electronic ISBNs	978-90-365-4654-6
DOIs	https://doi.org/10.3990/1.9789036546546
Publication status	Published - 8 Nov 2018

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Thesis D.S. KuznetsovFinal published version, 3.12 MB

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title = "Structure control of La/B multilayer systems by partial nitridation",

abstract = "This PhD thesis contains a selection of thin film research results on the structure control of La/B multilayer mirrors with nm- and sub nm-thick layers, used at normal and grazing incidence of XUV radiation. Topics investigated include an improvement of the optical layer contrast, the reflectivity at 6.x nm wavelength, and the thermal stability. The approaches presented deal with in situ growth studies, deposition control and high resolution X-ray analysis.",

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AU - Kuznetsov, Dmitry S.

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N2 - This PhD thesis contains a selection of thin film research results on the structure control of La/B multilayer mirrors with nm- and sub nm-thick layers, used at normal and grazing incidence of XUV radiation. Topics investigated include an improvement of the optical layer contrast, the reflectivity at 6.x nm wavelength, and the thermal stability. The approaches presented deal with in situ growth studies, deposition control and high resolution X-ray analysis.

AB - This PhD thesis contains a selection of thin film research results on the structure control of La/B multilayer mirrors with nm- and sub nm-thick layers, used at normal and grazing incidence of XUV radiation. Topics investigated include an improvement of the optical layer contrast, the reflectivity at 6.x nm wavelength, and the thermal stability. The approaches presented deal with in situ growth studies, deposition control and high resolution X-ray analysis.

U2 - 10.3990/1.9789036546546

DO - 10.3990/1.9789036546546

M3 - PhD Thesis - Research UT, graduation UT

PB - University of Twente

CY - Enschede

ER -

Structure control of La/B multilayer systems by partial nitridation

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