Structure control of La/B multilayer systems by partial nitridation

Dmitry Kuznetsov

Research output: ThesisPhD Thesis - Research UT, graduation UT

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Abstract

This PhD thesis contains a selection of thin film research results on the structure control of La/B multilayer mirrors with nm- and sub nm-thick layers, used at normal and grazing incidence of XUV radiation. Topics investigated include an improvement of the optical layer contrast, the reflectivity at 6.x nm wavelength, and the thermal stability. The approaches presented deal with in situ growth studies, deposition control and high resolution X-ray analysis.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • Yakshin, Andrey , Co-Supervisor
Award date8 Nov 2018
Place of PublicationEnschede
Publisher
Electronic ISBNs978-90-365-4654-6
DOIs
Publication statusPublished - 8 Nov 2018

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