Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation

Dmitry Kuznetsov; Andrey Yakshin; Jacobus Marinus Sturm; Robbert Wilhelmus Elisabeth van de Kruijs; Frederik Bijkerk

doi:10.1063/1.4968175

Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation

Dmitry Kuznetsov, Andrey Yakshin, Jacobus Marinus Sturm, Robbert Wilhelmus Elisabeth van de Kruijs, Frederik Bijkerk

Research output: Contribution to journal › Article › Academic › peer-review

12 Citations (Scopus)

140 Downloads (Pure)

Abstract

We investigate a hybrid thin film deposition procedure that significantly enhances reflectivity of La/B based nanoscale multilayer structures to be used as Extreme UV mirrors at 6.7 nm wavelength and beyond. We have analyzed the La-nitridation process in detail, and proposed a growth mechanism and deposition procedure for full, stoichiometric passivation of La, avoiding the formation of optically unfavorable BN formation at the LaN-on-B interface. A partial nitridation was applied and studied as a function of the nitridation delay.

Original language	English
Article number	115117
Number of pages	9
Journal	AIP advances
Volume	6
DOIs	https://doi.org/10.1063/1.4968175
Publication status	Published - 2016

Keywords

METIS-318716
IR-102000

Access to Document

10.1063/1.4968175

Kuznetsov2016structureFinal published version, 2.87 MB

Cite this

@article{661381bec1b34f519b57112b716ee6ba,

title = "Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation",

abstract = "We investigate a hybrid thin film deposition procedure that significantly enhances reflectivity of La/B based nanoscale multilayer structures to be used as Extreme UV mirrors at 6.7 nm wavelength and beyond. We have analyzed the La-nitridation process in detail, and proposed a growth mechanism and deposition procedure for full, stoichiometric passivation of La, avoiding the formation of optically unfavorable BN formation at the LaN-on-B interface. A partial nitridation was applied and studied as a function of the nitridation delay.",

keywords = "METIS-318716, IR-102000",

author = "Dmitry Kuznetsov and Andrey Yakshin and Sturm, {Jacobus Marinus} and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Frederik Bijkerk",

year = "2016",

doi = "10.1063/1.4968175",

language = "English",

volume = "6",

journal = "AIP advances",

issn = "2158-3226",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation

AU - Kuznetsov, Dmitry

AU - Yakshin, Andrey

AU - Sturm, Jacobus Marinus

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Bijkerk, Frederik

PY - 2016

Y1 - 2016

N2 - We investigate a hybrid thin film deposition procedure that significantly enhances reflectivity of La/B based nanoscale multilayer structures to be used as Extreme UV mirrors at 6.7 nm wavelength and beyond. We have analyzed the La-nitridation process in detail, and proposed a growth mechanism and deposition procedure for full, stoichiometric passivation of La, avoiding the formation of optically unfavorable BN formation at the LaN-on-B interface. A partial nitridation was applied and studied as a function of the nitridation delay.

AB - We investigate a hybrid thin film deposition procedure that significantly enhances reflectivity of La/B based nanoscale multilayer structures to be used as Extreme UV mirrors at 6.7 nm wavelength and beyond. We have analyzed the La-nitridation process in detail, and proposed a growth mechanism and deposition procedure for full, stoichiometric passivation of La, avoiding the formation of optically unfavorable BN formation at the LaN-on-B interface. A partial nitridation was applied and studied as a function of the nitridation delay.

KW - METIS-318716

KW - IR-102000

U2 - 10.1063/1.4968175

DO - 10.1063/1.4968175

M3 - Article

SN - 2158-3226

VL - 6

JO - AIP advances

JF - AIP advances

M1 - 115117

ER -

Structure of high-reflectance La/B-based multilayer mirrors with partial La nitridation

Abstract

Keywords

Access to Document

Fingerprint

Cite this