Studies of AIN growth on various substrates by RF reactive sputtering techniques

S. Saravanan, J.W. Berenschot, M.J. de Boer, G.J.M. Krijnen, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of MME’03
Place of Publication	Delft
Pages	163-166
Publication status	Published - 2003
Event	14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands Duration: 2 Nov 2003 → 4 Nov 2003 Conference number: 14

Conference	14th MicroMechanics Europe Workshop, MME 2003
Abbreviated title	MME
Country/Territory	Netherlands
City	Delft
Period	2/11/03 → 4/11/03

Cite this

@inproceedings{0497799f01214e8c954fa4f2b2a0e5ea,

title = "Studies of AIN growth on various substrates by RF reactive sputtering techniques",

author = "S. Saravanan and J.W. Berenschot and {de Boer}, M.J. and G.J.M. Krijnen and M.C. Elwenspoek",

year = "2003",

language = "English",

pages = "163--166",

booktitle = "Proceedings of MME{\textquoteright}03",

note = "14th MicroMechanics Europe Workshop, MME 2003, MME ; Conference date: 02-11-2003 Through 04-11-2003",

}

TY - GEN

T1 - Studies of AIN growth on various substrates by RF reactive sputtering techniques

AU - Saravanan, S.

AU - Berenschot, J.W.

AU - de Boer, M.J.

AU - Krijnen, G.J.M.

AU - Elwenspoek, M.C.

N1 - Conference code: 14

PY - 2003

Y1 - 2003

M3 - Conference contribution

SP - 163

EP - 166

BT - Proceedings of MME’03

CY - Delft

T2 - 14th MicroMechanics Europe Workshop, MME 2003

Y2 - 2 November 2003 through 4 November 2003

ER -