Studies of AIN growth on various substrates by RF reactive sputtering techniques

S. Saravanan, S. Saravanan, Johan W. Berenschot, Meint J. de Boer, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of MME Conference 2003
    Place of PublicationDelft
    Pages163-166
    Publication statusPublished - 2003
    Event14th MicroMechanics Europe Workshop, MME 2003 - Delft, Netherlands
    Duration: 2 Nov 20034 Nov 2003
    Conference number: 14

    Conference

    Conference14th MicroMechanics Europe Workshop, MME 2003
    Abbreviated titleMME
    CountryNetherlands
    CityDelft
    Period2/11/034/11/03

    Keywords

    • METIS-214516
    • IR-46302

    Cite this

    Saravanan, S., Saravanan, S., Berenschot, J. W., de Boer, M. J., Krijnen, G. J. M., & Elwenspoek, M. C. (2003). Studies of AIN growth on various substrates by RF reactive sputtering techniques. In Proceedings of MME Conference 2003 (pp. 163-166). Delft.