Study of crack formation in high-aspect ratio SU-8 structures on silicon

Svetlana Nikolajevna van Nieuwkasteele-Bystrova, Regina Lüttge, Albert van den Berg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageUndefined
    Title of host publicationInternational conference on micro- and nano engineering 2006
    Pages-
    Publication statusPublished - 2006
    Event32nd International Conference on Micro & Nano Engineering, MNE 2006 - Barcelona, Spain
    Duration: 17 Sep 200620 Sep 2006
    Conference number: 32

    Conference

    Conference32nd International Conference on Micro & Nano Engineering, MNE 2006
    Abbreviated titleMNE
    Country/TerritorySpain
    CityBarcelona
    Period17/09/0620/09/06

    Keywords

    • METIS-247153

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