Study of crack formation in high-aspect ratio SU-8 structures on silicon

S. Bystrova, R. Lüttge, A. van den Berg

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    Original languageEnglish
    Title of host publication32nd International Conference on Micro- and Nano Engineering 2006
    Subtitle of host publication17-20 September 2006, Barcelona, Spain
    Publication statusPublished - 2006
    Event32nd International Conference on Micro & Nano Engineering, MNE 2006 - Barcelona, Spain
    Duration: 17 Sept 200620 Sept 2006
    Conference number: 32

    Conference

    Conference32nd International Conference on Micro & Nano Engineering, MNE 2006
    Abbreviated titleMNE
    Country/TerritorySpain
    CityBarcelona
    Period17/09/0620/09/06

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