Study of crack formation in high-aspect ratio SU-8 structures on silicon

S. Bystrova, R. Lüttge, A. van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	English
Title of host publication	32nd International Conference on Micro- and Nano Engineering 2006
Subtitle of host publication	17-20 September 2006, Barcelona, Spain
Publication status	Published - 2006
Event	32nd International Conference on Micro & Nano Engineering, MNE 2006 - Barcelona, Spain Duration: 17 Sept 2006 → 20 Sept 2006 Conference number: 32

Conference	32nd International Conference on Micro & Nano Engineering, MNE 2006
Abbreviated title	MNE
Country/Territory	Spain
City	Barcelona
Period	17/09/06 → 20/09/06

Cite this

@inproceedings{2c5febd999974edf8aa337767e27cc1e,

title = "Study of crack formation in high-aspect ratio SU-8 structures on silicon",

author = "S. Bystrova and R. L{\"u}ttge and {van den Berg}, A.",

year = "2006",

language = "English",

booktitle = "32nd International Conference on Micro- and Nano Engineering 2006",

note = "32nd International Conference on Micro & Nano Engineering, MNE 2006, MNE ; Conference date: 17-09-2006 Through 20-09-2006",

}

TY - GEN

T1 - Study of crack formation in high-aspect ratio SU-8 structures on silicon

AU - Bystrova, S.

AU - Lüttge, R.

AU - van den Berg, A.

N1 - Conference code: 32

PY - 2006

Y1 - 2006

M3 - Conference contribution

BT - 32nd International Conference on Micro- and Nano Engineering 2006

T2 - 32nd International Conference on Micro & Nano Engineering, MNE 2006

Y2 - 17 September 2006 through 20 September 2006

ER -