Study of crack formation in high-aspect ratio SU-8 structures on silicon

Svetlana Nikolajevna van Nieuwkasteele-Bystrova, Regina Lüttge, Albert van den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

Original language	Undefined
Title of host publication	International conference on micro- and nano engineering 2006
Pages	-
Publication status	Published - 2006
Event	32nd International Conference on Micro & Nano Engineering, MNE 2006 - Barcelona, Spain Duration: 17 Sep 2006 → 20 Sep 2006 Conference number: 32

Conference	32nd International Conference on Micro & Nano Engineering, MNE 2006
Abbreviated title	MNE
Country/Territory	Spain
City	Barcelona
Period	17/09/06 → 20/09/06

Keywords

@inproceedings{2c5febd999974edf8aa337767e27cc1e,

title = "Study of crack formation in high-aspect ratio SU-8 structures on silicon",

keywords = "METIS-247153",

author = "{van Nieuwkasteele-Bystrova}, {Svetlana Nikolajevna} and Regina L{\"u}ttge and {van den Berg}, Albert",

year = "2006",

language = "Undefined",

pages = "--",

booktitle = "International conference on micro- and nano engineering 2006",

note = "null ; Conference date: 17-09-2006 Through 20-09-2006",

}

TY - GEN

T1 - Study of crack formation in high-aspect ratio SU-8 structures on silicon

AU - van Nieuwkasteele-Bystrova, Svetlana Nikolajevna

AU - Lüttge, Regina

AU - van den Berg, Albert

N1 - Conference code: 32

PY - 2006

Y1 - 2006

KW - METIS-247153

M3 - Conference contribution

SP - -

BT - International conference on micro- and nano engineering 2006

Y2 - 17 September 2006 through 20 September 2006

ER -