Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications

S. Saravanan, G. Krijnen, M. Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Safe/SeSens Conference 2003
    Place of PublicationUtrecht
    PublisherSTW
    Number of pages3
    Publication statusPublished - 2003
    EventSAFE/SeSens 2003 - Veldhoven, the Netherlands
    Duration: 25 Nov 200326 Nov 2003

    Workshop

    WorkshopSAFE/SeSens 2003
    Period25/11/0326/11/03
    OtherNovember 25-26, 2003

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