Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications

S. Saravanan, S. Saravanan, Gijsbertus J.M. Krijnen, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of Safe/SeSens Conference 2003
    Number of pages3
    Publication statusPublished - 2003


    • IR-46525
    • METIS-215250

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