Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	English
Title of host publication	Proceedings of Safe/SeSens Conference 2003
Place of Publication	Utrecht
Publisher	STW
Number of pages	3
Publication status	Published - 2003
Event	SAFE/SeSens 2003 - Veldhoven, the Netherlands Duration: 25 Nov 2003 → 26 Nov 2003

Cite this

@inproceedings{e3365884395f43d1865ad890e5e0270f,

title = "Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications",

author = "S. Saravanan and G. Krijnen and M. Elwenspoek",

year = "2003",

language = "English",

booktitle = "Proceedings of Safe/SeSens Conference 2003",

publisher = "STW",

note = "SAFE/SeSens 2003 ; Conference date: 25-11-2003 Through 26-11-2003",

}

TY - GEN

T1 - Study of preferred oriented (002) AIN thin films on Si (100) substrates by RF reactive sputtering for piezoelectric applications

AU - Saravanan, S.

AU - Krijnen, G.

AU - Elwenspoek, M.

PY - 2003

Y1 - 2003

M3 - Conference contribution

BT - Proceedings of Safe/SeSens Conference 2003

PB - STW

CY - Utrecht

T2 - SAFE/SeSens 2003

Y2 - 25 November 2003 through 26 November 2003

ER -