Study of spin-on dopant materials for micro-electronic technology prepared by sol-gel method

Nhu Toan Nguyen, T.D. Quyen, N.D. Chien, Tran Kim Anh, C. Barthou

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 7th National Telecom and Communication Conference Proceeding
Place of Publication	Hanoi, Vietnam
Pages	343-350
Number of pages	8
Publication status	Published - 13 Dec 1998

Keywords

@inproceedings{ba6f88bee4ae4b07a05d51ffae7c61bf,

title = "Study of spin-on dopant materials for micro-electronic technology prepared by sol-gel method",

keywords = "METIS-113845",

author = "Nguyen, {Nhu Toan} and T.D. Quyen and N.D. Chien and Anh, {Tran Kim} and C. Barthou",

year = "1998",

month = dec,

day = "13",

language = "Undefined",

pages = "343--350",

booktitle = "Proceedings of the 7th National Telecom and Communication Conference Proceeding",

}

Study of spin-on dopant materials for micro-electronic technology prepared by sol-gel method. / Nguyen, Nhu Toan; Quyen, T.D.; Chien, N.D. et al.
Proceedings of the 7th National Telecom and Communication Conference Proceeding. Hanoi, Vietnam, 1998. p. 343-350.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Study of spin-on dopant materials for micro-electronic technology prepared by sol-gel method

AU - Nguyen, Nhu Toan

AU - Quyen, T.D.

AU - Chien, N.D.

AU - Anh, Tran Kim

AU - Barthou, C.

PY - 1998/12/13

Y1 - 1998/12/13

KW - METIS-113845

M3 - Conference contribution

SP - 343

EP - 350

BT - Proceedings of the 7th National Telecom and Communication Conference Proceeding

CY - Hanoi, Vietnam

ER -