Study of spin-on dopant materials for micro-electronic technology prepared by sol-gel method

Nhu Toan Nguyen, T.D. Quyen, N.D. Chien, Tran Kim Anh, C. Barthou

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the 7th National Telecom and Communication Conference Proceeding
    Place of PublicationHanoi, Vietnam
    Number of pages8
    Publication statusPublished - 13 Dec 1998


    • METIS-113845

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