SU-8 micro Coriolis mass flow sensor

Rosa Monge, Jarno Groenesteijn, Dennis Alveringh, Remco J. Wiegerink, Joost Conrad Lötters, Luis J. Fernandez

    Research output: Contribution to journalArticleAcademicpeer-review

    1 Citation (Scopus)

    Abstract

    Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA).
    Original languageEnglish
    Pages (from-to)744-749
    Number of pages5
    JournalSensors and actuators. B: Chemical
    Volume241
    DOIs
    Publication statusPublished - 31 Mar 2017

    Fingerprint

    isopropyl alcohol
    2-Propanol
    mass flow
    Alcohols
    Water
    sensors
    Sensors
    chips
    water
    Lorentz force
    Photolithography
    photolithography
    pressure drop
    actuation
    Pressure drop
    Metals
    Fabrication
    fabrication
    cross sections
    metals

    Keywords

    • EWI-27720
    • Coriolis
    • Micro-fluidics
    • IR-103455
    • MEMS
    • Flow sensor
    • SU-8

    Cite this

    Monge, Rosa ; Groenesteijn, Jarno ; Alveringh, Dennis ; Wiegerink, Remco J. ; Lötters, Joost Conrad ; Fernandez, Luis J. / SU-8 micro Coriolis mass flow sensor. In: Sensors and actuators. B: Chemical. 2017 ; Vol. 241. pp. 744-749.
    @article{71703662c1c54b04a4335e43f1d4a84f,
    title = "SU-8 micro Coriolis mass flow sensor",
    abstract = "Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA).",
    keywords = "EWI-27720, Coriolis, Micro-fluidics, IR-103455, MEMS, Flow sensor, SU-8",
    author = "Rosa Monge and Jarno Groenesteijn and Dennis Alveringh and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad} and Fernandez, {Luis J.}",
    year = "2017",
    month = "3",
    day = "31",
    doi = "10.1016/j.snb.2016.10.133",
    language = "English",
    volume = "241",
    pages = "744--749",
    journal = "Sensors and actuators. B: Chemical",
    issn = "0925-4005",
    publisher = "Elsevier",

    }

    SU-8 micro Coriolis mass flow sensor. / Monge, Rosa; Groenesteijn, Jarno; Alveringh, Dennis; Wiegerink, Remco J.; Lötters, Joost Conrad; Fernandez, Luis J.

    In: Sensors and actuators. B: Chemical, Vol. 241, 31.03.2017, p. 744-749.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - SU-8 micro Coriolis mass flow sensor

    AU - Monge, Rosa

    AU - Groenesteijn, Jarno

    AU - Alveringh, Dennis

    AU - Wiegerink, Remco J.

    AU - Lötters, Joost Conrad

    AU - Fernandez, Luis J.

    PY - 2017/3/31

    Y1 - 2017/3/31

    N2 - Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA).

    AB - Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA).

    KW - EWI-27720

    KW - Coriolis

    KW - Micro-fluidics

    KW - IR-103455

    KW - MEMS

    KW - Flow sensor

    KW - SU-8

    U2 - 10.1016/j.snb.2016.10.133

    DO - 10.1016/j.snb.2016.10.133

    M3 - Article

    VL - 241

    SP - 744

    EP - 749

    JO - Sensors and actuators. B: Chemical

    JF - Sensors and actuators. B: Chemical

    SN - 0925-4005

    ER -