SU-8 micro Coriolis mass flow sensor

Rosa Monge, Jarno Groenesteijn, Dennis Alveringh, Remco J. Wiegerink, Joost Conrad Lötters, Luis J. Fernandez

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Scopus)

Abstract

Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA).
Original languageEnglish
Pages (from-to)744-749
Number of pages5
JournalSensors and actuators. B: Chemical
Volume241
DOIs
Publication statusPublished - 31 Mar 2017

Fingerprint

isopropyl alcohol
2-Propanol
mass flow
Alcohols
Water
sensors
Sensors
chips
water
Lorentz force
Photolithography
photolithography
pressure drop
actuation
Pressure drop
Metals
Fabrication
fabrication
cross sections
metals

Keywords

  • EWI-27720
  • Coriolis
  • Micro-fluidics
  • IR-103455
  • MEMS
  • Flow sensor
  • SU-8

Cite this

Monge, Rosa ; Groenesteijn, Jarno ; Alveringh, Dennis ; Wiegerink, Remco J. ; Lötters, Joost Conrad ; Fernandez, Luis J. / SU-8 micro Coriolis mass flow sensor. In: Sensors and actuators. B: Chemical. 2017 ; Vol. 241. pp. 744-749.
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title = "SU-8 micro Coriolis mass flow sensor",
abstract = "Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA).",
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SU-8 micro Coriolis mass flow sensor. / Monge, Rosa; Groenesteijn, Jarno; Alveringh, Dennis; Wiegerink, Remco J.; Lötters, Joost Conrad; Fernandez, Luis J.

In: Sensors and actuators. B: Chemical, Vol. 241, 31.03.2017, p. 744-749.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - SU-8 micro Coriolis mass flow sensor

AU - Monge, Rosa

AU - Groenesteijn, Jarno

AU - Alveringh, Dennis

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

AU - Fernandez, Luis J.

PY - 2017/3/31

Y1 - 2017/3/31

N2 - Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA).

AB - Abstract This work presents the modelling, design, fabrication and test of the first micro Coriolis mass flow sensor fully fabricated in SU-8 by photolithography processes. The sensor consists of a channel with rectangular cross-section with inner opening of 100 μm × 100 μm and is actuated at resonance by Lorentz forces. Metal tracks for the actuation current are deposited on top of the chip. The chip has been tested over a flow range of 0–800 mg/min in the case of water and 0–650 mg/min for isopropyl alcohol (IPA) to confirm that the sensor measures true mass flow (at the maximum flow of the tested range, 0–800 μl/min for both water and IPA, it results in a pressure drop of 0.98 bar for water and 1.97 bar for IPA).

KW - EWI-27720

KW - Coriolis

KW - Micro-fluidics

KW - IR-103455

KW - MEMS

KW - Flow sensor

KW - SU-8

U2 - 10.1016/j.snb.2016.10.133

DO - 10.1016/j.snb.2016.10.133

M3 - Article

VL - 241

SP - 744

EP - 749

JO - Sensors and actuators. B: Chemical

JF - Sensors and actuators. B: Chemical

SN - 0925-4005

ER -