Sub-10 nm silicon ridge nanofabrication by advanced edge lithography for NIL applications

Yiping Zhao, Johan W. Berenschot, Henricus V. Jansen, Niels Roelof Tas, Jurriaan Huskens, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademicpeer-review

40 Citations (Scopus)

Abstract

A new nanofabrication scheme is presented to form stamps useful in thermal nanoimprint lithography (T-NIL). The stamp is created in <110> single crystalline silicon using a full-wet etching procedure including local oxidation of silicon (LOCOS) and employing an adapted edge lithography technique on top of conventional photolithography. Ridges down to 10 nm in width have been produced. The silicon ridges have no inbuilt stress and are therefore less fragile than previously fabricated oxide ridges. The ridge sample is used as a template in T-NIL and a full 100 mm wafer size imprint has been successfully carried out in both polymethylmethacrylate (PMMA) and mr-I 7020E polymer. Moreover, the imprinted pattern in PMMA is subsequently transferred into a device wafer.
Original languageEnglish
Pages (from-to)832-835
Number of pages4
JournalMicroelectronic engineering
Volume86
Issue number4-6
DOIs
Publication statusPublished - Apr 2009

Keywords

  • Edge lithography
  • EWI-16026
  • Silicon ridge nano fabrication
  • IR-67588
  • Nanoimprint lithography
  • METIS-259853

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