Sub-50 nm patterning of functional oxides by soft lithographic edge printing

A. George; Johan E. ten Elshof

doi:10.1039/c2jm31121f

Sub-50 nm patterning of functional oxides by soft lithographic edge printing

A. George, Johan E. ten Elshof

Research output: Contribution to journal › Article › Academic › peer-review

7 Citations (Scopus)

3 Downloads (Pure)

Abstract

We report a fast, versatile and reproducible method to make arbitrary nanoscale patterns of functional metal oxides by edge transfer printing of aqueous metal-loaded water-soluble polyacrylic acid (PAA) solutions on silicon. Patterns of ZnO, CuO, NiO and Fe2O3 with lateral dimensions below 50 nm were realized. The process uses elastomeric PDMS stamps with microscale feature sizes to fabricate nanoscale patterns, so that stamp deformation problems are minimized despite the high resolution.

Original language	Undefined
Pages (from-to)	9501-9504
Number of pages	4
Journal	Journal of materials chemistry
Volume	22
DOIs	https://doi.org/10.1039/c2jm31121f
Publication status	Published - 2012

Keywords

IR-81888
Andere transportmiddelen
METIS-288509

Access to Document

10.1039/c2jm31121f

Cite this

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title = "Sub-50 nm patterning of functional oxides by soft lithographic edge printing",

abstract = "We report a fast, versatile and reproducible method to make arbitrary nanoscale patterns of functional metal oxides by edge transfer printing of aqueous metal-loaded water-soluble polyacrylic acid (PAA) solutions on silicon. Patterns of ZnO, CuO, NiO and Fe2O3 with lateral dimensions below 50 nm were realized. The process uses elastomeric PDMS stamps with microscale feature sizes to fabricate nanoscale patterns, so that stamp deformation problems are minimized despite the high resolution.",

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AU - George, A.

AU - ten Elshof, Johan E.

PY - 2012

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N2 - We report a fast, versatile and reproducible method to make arbitrary nanoscale patterns of functional metal oxides by edge transfer printing of aqueous metal-loaded water-soluble polyacrylic acid (PAA) solutions on silicon. Patterns of ZnO, CuO, NiO and Fe2O3 with lateral dimensions below 50 nm were realized. The process uses elastomeric PDMS stamps with microscale feature sizes to fabricate nanoscale patterns, so that stamp deformation problems are minimized despite the high resolution.

AB - We report a fast, versatile and reproducible method to make arbitrary nanoscale patterns of functional metal oxides by edge transfer printing of aqueous metal-loaded water-soluble polyacrylic acid (PAA) solutions on silicon. Patterns of ZnO, CuO, NiO and Fe2O3 with lateral dimensions below 50 nm were realized. The process uses elastomeric PDMS stamps with microscale feature sizes to fabricate nanoscale patterns, so that stamp deformation problems are minimized despite the high resolution.

KW - IR-81888

KW - Andere transportmiddelen

KW - METIS-288509

U2 - 10.1039/c2jm31121f

DO - 10.1039/c2jm31121f

M3 - Article

SN - 0959-9428

VL - 22

SP - 9501

EP - 9504

JO - Journal of materials chemistry

JF - Journal of materials chemistry

ER -