Sub-500 °C solid-phase epitaxy of ultra-abrupt p+-silicon elevated contacts and diodes

Yann Civale*, Lis K. Nanver, Peter Hadley, Egbert J.G. Goudena, Hugo Schellevis

*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

20 Citations (Scopus)

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Engineering & Materials Science

Chemistry