Sub-micron-scale femtosecond laser ablation using a digital micromirror device

B. Mills, Matthias Feinaeugle, C.L. Sones, N. Rizvi, R.W. Eason

    Research output: Contribution to journalArticleAcademicpeer-review

    24 Citations (Scopus)

    Abstract

    Commercial digital multimirror devices offer a cheap and effective alternative to more expensive spatial light modulators for ablation via beam shaping. Here we present femtosecond laser ablation using the digital multimirror device from an Acer C20 Pico Digital Light Projector and show ablation of complex features with feature sizes ranging from sub-wavelength (400 nm) up to ∼30 ̈m. Simulations are presented that have been used to optimize and understand the experimentally observed resolution.
    Original languageEnglish
    Article number035005
    Number of pages8
    JournalJournal of micromechanics and microengineering
    Volume23
    Issue number3
    DOIs
    Publication statusPublished - 25 Jan 2013

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