Sub-micron-scale femtosecond laser ablation using a digital micromirror device

B. Mills; Matthias  Feinaeugle; C.L. Sones; N. Rizvi; R.W. Eason

doi:10.1088/0960-1317/23/3/035005

Sub-micron-scale femtosecond laser ablation using a digital micromirror device

B. Mills, Matthias Feinaeugle, C.L. Sones, N. Rizvi, R.W. Eason

Research output: Contribution to journal › Article › Academic › peer-review

27 Citations (Scopus)

Abstract

Commercial digital multimirror devices offer a cheap and effective alternative to more expensive spatial light modulators for ablation via beam shaping. Here we present femtosecond laser ablation using the digital multimirror device from an Acer C20 Pico Digital Light Projector and show ablation of complex features with feature sizes ranging from sub-wavelength (400 nm) up to ∼30 ̈m. Simulations are presented that have been used to optimize and understand the experimentally observed resolution.

Original language	English
Article number	035005
Number of pages	8
Journal	Journal of micromechanics and microengineering
Volume	23
Issue number	3
DOIs	https://doi.org/10.1088/0960-1317/23/3/035005
Publication status	Published - 25 Jan 2013

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AU - Eason, R.W.

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AB - Commercial digital multimirror devices offer a cheap and effective alternative to more expensive spatial light modulators for ablation via beam shaping. Here we present femtosecond laser ablation using the digital multimirror device from an Acer C20 Pico Digital Light Projector and show ablation of complex features with feature sizes ranging from sub-wavelength (400 nm) up to ∼30 ̈m. Simulations are presented that have been used to optimize and understand the experimentally observed resolution.

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Sub-micron-scale femtosecond laser ablation using a digital micromirror device

Abstract

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