Abstract
Commercial digital multimirror devices offer a cheap and effective alternative to more expensive spatial light modulators for ablation via beam shaping. Here we present femtosecond laser ablation using the digital multimirror device from an Acer C20 Pico Digital Light Projector and show ablation of complex features with feature sizes ranging from sub-wavelength (400 nm) up to ∼30 ̈m. Simulations are presented that have been used to optimize and understand the experimentally observed resolution.
| Original language | English |
|---|---|
| Article number | 035005 |
| Number of pages | 8 |
| Journal | Journal of micromechanics and microengineering |
| Volume | 23 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 25 Jan 2013 |
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Mills, B., Feinaeugle, M., Sones, C. L., Rizvi, N., & Eason, R. W. (2013). Sub-micron-scale femtosecond laser ablation using a digital micromirror device. Journal of micromechanics and microengineering, 23(3), [035005]. https://doi.org/10.1088/0960-1317/23/3/035005