Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application

Dannis Michel Brouwer, B.R. de Jong, Herman Soemers, Johannes van Dijk

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Abstract

A design is presented for a large force (0.5 mN) high precision MEMS clamping mechanism. The clamp is part of a MEMS TEM sample manipulator, which needs to be fixed un-powered once positioned. The elastic deformation of the clamp suspension has been optimized to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing force for deformation and thus the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact and optimal design.
Original languageUndefined
Title of host publicationProceedings of the 16th MME MicroMechanics Europe Workshop
Place of PublicationGöteborg
PublisherTrycket AB, Göteborg
Pages1-4
Number of pages4
ISBN (Print)91-631-7553-3
Publication statusPublished - 2005
Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
Duration: 4 Sep 20056 Sep 2005
Conference number: 16

Workshop

Workshop16th MicroMechanics Europe Workshop, MME 2005
Abbreviated titleMME
CountrySweden
CityGöteborg
Period4/09/056/09/05

Keywords

  • EWI-10410
  • METIS-224331
  • IR-52654

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