Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

Dannis Michel Brouwer; B.R. de Jong; Herman Soemers; Johannes van Dijk

doi:10.1088/0960-1317/16/6/S02

Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

Dannis Michel Brouwer, B.R. de Jong, Herman Soemers, Johannes van Dijk

Faculty of Engineering Technology

Research output: Contribution to journal › Article › Academic › peer-review

8 Citations (Scopus)

43 Downloads (Pure)

Abstract

A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been optimized in order to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing the force needed for deformation and thus reducing the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact design.

Original language	Undefined
Pages (from-to)	7-12
Number of pages	6
Journal	Journal of micromechanics and microengineering
Volume	16
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/16/6/S02
Publication status	Published - 2006

Keywords

EWI-20103
IR-74321
METIS-235244

Access to Document

10.1088/0960-1317/16/6/S02

sub-nanometer

Cite this

@article{9e4c67f6006543de9ef1c3ca1e550ab5,

title = "Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application",

abstract = "A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been optimized in order to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing the force needed for deformation and thus reducing the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact design.",

keywords = "EWI-20103, IR-74321, METIS-235244",

author = "Brouwer, {Dannis Michel} and {de Jong}, B.R. and Herman Soemers and {van Dijk}, Johannes",

year = "2006",

doi = "10.1088/0960-1317/16/6/S02",

language = "Undefined",

volume = "16",

pages = "7--12",

journal = "Journal of micromechanics and microengineering",

issn = "0960-1317",

publisher = "IOP Publishing Ltd.",

number = "6",

}

TY - JOUR

T1 - Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

AU - Brouwer, Dannis Michel

AU - de Jong, B.R.

AU - Soemers, Herman

AU - van Dijk, Johannes

PY - 2006

Y1 - 2006

N2 - A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been optimized in order to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing the force needed for deformation and thus reducing the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact design.

AB - A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been optimized in order to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing the force needed for deformation and thus reducing the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact design.

KW - EWI-20103

KW - IR-74321

KW - METIS-235244

U2 - 10.1088/0960-1317/16/6/S02

DO - 10.1088/0960-1317/16/6/S02

M3 - Article

VL - 16

SP - 7

EP - 12

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

IS - 6

ER -