Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

Dannis Michel Brouwer; B.R. de Jong; Herman Soemers; Johannes van Dijk

doi:10.1088/0960-1317/16/6/S02

Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force unpowered for TEM application

Dannis Michel Brouwer, B.R. de Jong, Herman Soemers, Johannes van Dijk

Faculty of Engineering Technology

Research output: Contribution to journal › Article › Academic › peer-review

8 Citations (Scopus)

44 Downloads (Pure)

Abstract

A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been optimized in order to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing the force needed for deformation and thus reducing the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact design.

Original language	Undefined
Pages (from-to)	7-12
Number of pages	6
Journal	Journal of micromechanics and microengineering
Volume	16
Issue number	6
DOIs	https://doi.org/10.1088/0960-1317/16/6/S02
Publication status	Published - 2006

Keywords

EWI-20103
IR-74321
METIS-235244

Access to Document

10.1088/0960-1317/16/6/S02

sub-nanometer
open

Cite this

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abstract = "A design is presented for a relatively large force (0.5 mN) high-precision MEMS clamping mechanism. The clamp is a part of a MEMS transmission electron microscope (TEM) sample manipulator, which needs to be fixed unpowered once positioned. The elastic deformation of the clamp suspension has been optimized in order to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing the force needed for deformation and thus reducing the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact design.",

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