Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application

D.M. Brouwer; B.R. de Jong; H.M.J.R. Soemers; J. van Dijk

Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application

D.M. Brouwer
, B.R. de Jong
, H.M.J.R. Soemers
, J. van Dijk

Faculty of Engineering Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

68 Downloads (Pure)

Abstract

A design is presented for a large force (0.5 mN) high precision MEMS clamping mechanism. The clamp is part of a MEMS TEM sample manipulator, which needs to be fixed un-powered once positioned. The elastic deformation of the clamp suspension has been optimized to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing force for deformation and thus the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact and optimal design.

Original language	English
Title of host publication	Proceedings of the 16th MME MicroMechanics Europe Workshop
Subtitle of host publication	4-6 September 2005, Göteborg, Sweden
Editors	Peter Enoksson
Place of Publication	Göteborg, Sweden
Publisher	Trycket AB, Göteborg
Pages	1-4
Number of pages	4
ISBN (Print)	91-631-7553-3
Publication status	Published - 2005
Event	16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden Duration: 4 Sept 2005 → 6 Sept 2005 Conference number: 16

Workshop

Workshop	16th MicroMechanics Europe Workshop, MME 2005
Abbreviated title	MME
Country/Territory	Sweden
City	Göteborg
Period	4/09/05 → 6/09/05

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@inproceedings{11711709df9648dcbc156ef2efcb8801,

title = "Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application",

abstract = "A design is presented for a large force (0.5 mN) high precision MEMS clamping mechanism. The clamp is part of a MEMS TEM sample manipulator, which needs to be fixed un-powered once positioned. The elastic deformation of the clamp suspension has been optimized to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing force for deformation and thus the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact and optimal design.",

author = "D.M. Brouwer and \{de Jong\}, B.R. and H.M.J.R. Soemers and \{van Dijk\}, J.",

year = "2005",

language = "English",

isbn = "91-631-7553-3",

pages = "1--4",

editor = "Peter Enoksson",

booktitle = "Proceedings of the 16th MME MicroMechanics Europe Workshop",

publisher = "Trycket AB, G{\"o}teborg",

note = "16th MicroMechanics Europe Workshop, MME 2005, MME ; Conference date: 04-09-2005 Through 06-09-2005",

}

Brouwer, DM, de Jong, BR, Soemers, HMJR & van Dijk, J 2005, Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application. in P Enoksson (ed.), Proceedings of the 16th MME MicroMechanics Europe Workshop: 4-6 September 2005, Göteborg, Sweden. Trycket AB, Göteborg, Göteborg, Sweden, pp. 1-4, 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden, 4/09/05.

Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application. / Brouwer, D.M.; de Jong, B.R.; Soemers, H.M.J.R. et al.
Proceedings of the 16th MME MicroMechanics Europe Workshop: 4-6 September 2005, Göteborg, Sweden. ed. / Peter Enoksson. Göteborg, Sweden: Trycket AB, Göteborg, 2005. p. 1-4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application

AU - Brouwer, D.M.

AU - de Jong, B.R.

AU - Soemers, H.M.J.R.

AU - van Dijk, J.

N1 - Conference code: 16

PY - 2005

Y1 - 2005

N2 - A design is presented for a large force (0.5 mN) high precision MEMS clamping mechanism. The clamp is part of a MEMS TEM sample manipulator, which needs to be fixed un-powered once positioned. The elastic deformation of the clamp suspension has been optimized to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing force for deformation and thus the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact and optimal design.

AB - A design is presented for a large force (0.5 mN) high precision MEMS clamping mechanism. The clamp is part of a MEMS TEM sample manipulator, which needs to be fixed un-powered once positioned. The elastic deformation of the clamp suspension has been optimized to not influence the TEM sample manipulator position during clamping. The dimensions of the elastic elements have been further optimized for minimal elastic energy storage, minimizing force for deformation and thus the device area. Fabrication involves a back-etch release process, offering great design freedom, resulting in a compact and optimal design.

M3 - Conference contribution

SN - 91-631-7553-3

SP - 1

EP - 4

BT - Proceedings of the 16th MME MicroMechanics Europe Workshop

A2 - Enoksson, Peter

PB - Trycket AB, Göteborg

CY - Göteborg, Sweden

T2 - 16th MicroMechanics Europe Workshop, MME 2005

Y2 - 4 September 2005 through 6 September 2005

ER -

Sub-nanometer stable precision MEMS clamping mechanism maintaining clamp force un-powerd for TEM application

Abstract

Workshop

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