Subatomic accuracy in EUVL multilayer coatings

E. Zoethout*, P. Suter, R.W.E. van de Kruijs, A.E. Yakshin, E. Louis, F. Bijkerk, H. Enkisch, S. Müllender

*Corresponding author for this work

Research output: Contribution to journalConference articleAcademicpeer-review

3 Citations (Scopus)


Dive into the research topics of 'Subatomic accuracy in EUVL multilayer coatings'. Together they form a unique fingerprint.

Earth and Planetary Sciences



Material Science