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Subatomic accuracy in EUVL multilayer coatings
E. Zoethout*, P. Suter, R.W.E. van de Kruijs, A.E. Yakshin, E. Louis, F. Bijkerk, H. Enkisch, S. Müllender
*Corresponding author for this work
Research output: Contribution to journal › Conference article › Academic › peer-review
3
Citations
(Scopus)