Subnanometer Translation of Microelectromechanical Systems Measured by Discrete Fourier Analysis of CCD Images

Christophe Yamahata, Edin Sarajlic, Gijsbertus J.M. Krijnen, Martin A.M. Gijs

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    Abstract

    Abstract—In-plane linear displacements of microelectromechanical systems are measured with subnanometer accuracy by observing the periodic micropatterns with a charge-coupled device camera attached to an optical microscope. The translation of the microstructure is retrieved from the video by phase-shift computation using discrete Fourier transform analysis. This approach is validated through measurements on silicon devices featuring steep-sided periodic microstructures. The results are consistent with the electrical readout of a bulk micromachined capacitive sensor, demonstrating the suitability of this technique for both calibration and sensing. Using a vibration isolation table, a standard deviation of σ = 0.13 nm could be achieved, enabling a measurement resolution of 0.5 nm (4σ) and a subpixel resolution better than 1/100 pixel. [2010-0170]
    Original languageUndefined
    Pages (from-to)1273-1275
    Number of pages3
    JournalVehicle system dynamics
    Volume19
    Issue number5
    DOIs
    Publication statusPublished - Oct 2010

    Keywords

    • EWI-18549
    • Optical measurement
    • subpixel resolution
    • IR-73520
    • Discrete Fourier transform (DFT)
    • METIS-271058
    • phase correlation

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