Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

C. Yamahata, Edin Sarajlic, M. Stranczl, Gijsbertus J.M. Krijnen, M.A.M. Gijs

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    2 Citations (Scopus)

    Abstract

    We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel could be achieved, enabling quasi-static measurements with a resolution of 0.5 nm.
    Original languageUndefined
    Title of host publication16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11
    Place of PublicationUSA
    PublisherIEEE Photonics Society
    Pages1697-1700
    Number of pages4
    ISBN (Print)978-1-4577-0156-6
    DOIs
    Publication statusPublished - 5 Jun 2011
    Event16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China
    Duration: 5 Jun 20119 Jun 2011
    Conference number: 16
    http://transducers11-beijing.org/

    Publication series

    Name
    PublisherIEEE Photonics Society

    Conference

    Conference16th International Solid-State Sensors, Actuators and Microsystems Conference
    Abbreviated titleTRANSDUCERS 2011
    CountryChina
    CityBeijing
    Period5/06/119/06/11
    Internet address

    Keywords

    • METIS-277712
    • IR-77682
    • subpixel resolution
    • phase-shift measurement
    • EWI-20322
    • discrete Fourier transform
    • Optical measurement

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