Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

C. Yamahata; Edin Sarajlic; M. Stranczl; Gijsbertus J.M. Krijnen; M.A.M. Gijs

doi:10.1109/TRANSDUCERS.2011.5969574

Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

C. Yamahata, Edin Sarajlic, M. Stranczl, Gijsbertus J.M. Krijnen, M.A.M. Gijs

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

Abstract

We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel could be achieved, enabling quasi-static measurements with a resolution of 0.5 nm.

Original language	Undefined
Title of host publication	16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11
Place of Publication	USA
Publisher	IEEE
Pages	1697-1700
Number of pages	4
ISBN (Print)	978-1-4577-0156-6
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969574
Publication status	Published - 5 Jun 2011
Event	16th International Solid-State Sensors, Actuators and Microsystems Conference - China National Convention Center, Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011 Conference number: 16 http://transducers11-beijing.org/

Publication series

Name
Publisher	IEEE Photonics Society

Conference

Conference	16th International Solid-State Sensors, Actuators and Microsystems Conference
Abbreviated title	TRANSDUCERS 2011
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11
Internet address	http://transducers11-beijing.org/

Keywords

METIS-277712
IR-77682
subpixel resolution
phase-shift measurement
EWI-20322
discrete Fourier transform
Optical measurement

Access to Document

10.1109/TRANSDUCERS.2011.5969574

http://eprints.eemcs.utwente.nl/secure2/20322/01/C._Yamahata_SUBPIXEL_TRANSLATION_OF_MEMS_MEASURED.pdf

Cite this

@inproceedings{c7826ab9b4094c51a80c81ab68a33377,

title = "Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images",

abstract = "We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel could be achieved, enabling quasi-static measurements with a resolution of 0.5 nm.",

keywords = "METIS-277712, IR-77682, subpixel resolution, phase-shift measurement, EWI-20322, discrete Fourier transform, Optical measurement",

author = "C. Yamahata and Edin Sarajlic and M. Stranczl and Krijnen, {Gijsbertus J.M.} and M.A.M. Gijs",

year = "2011",

month = jun,

day = "5",

doi = "10.1109/TRANSDUCERS.2011.5969574",

language = "Undefined",

isbn = "978-1-4577-0156-6",

publisher = "IEEE",

pages = "1697--1700",

booktitle = "16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11",

address = "United States",

note = "16th International Solid-State Sensors, Actuators and Microsystems Conference ; Conference date: 05-06-2011 Through 09-06-2011",

url = "http://transducers11-beijing.org/",

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Yamahata, C, Sarajlic, E, Stranczl, M, Krijnen, GJM & Gijs, MAM 2011, Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images. in 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11. IEEE, USA, pp. 1697-1700, 16th International Solid-State Sensors, Actuators and Microsystems Conference, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969574

Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images. / Yamahata, C.; Sarajlic, Edin; Stranczl, M. et al.
16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11. USA: IEEE, 2011. p. 1697-1700.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Subpixel translation of MEMS measured by discrete fourier transform analysis of CCD images

AU - Yamahata, C.

AU - Sarajlic, Edin

AU - Stranczl, M.

AU - Krijnen, Gijsbertus J.M.

AU - Gijs, M.A.M.

N1 - Conference code: 16

PY - 2011/6/5

Y1 - 2011/6/5

N2 - We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel could be achieved, enabling quasi-static measurements with a resolution of 0.5 nm.

AB - We present a straightforward method for measuring in-plane linear displacements of microelectromechanical systems (MEMS) with subnanometer resolution. The technique is based on Fourier transform analysis of a video recorded with a Charge-Coupled Device (CCD) camera attached to an optical microscope and can be used to characterize any device featuring periodic patterns along the direction of motion. Using a digital microscope mounted on a vibration isolation table, a subpixel resolution better than 1/100 pixel could be achieved, enabling quasi-static measurements with a resolution of 0.5 nm.

KW - METIS-277712

KW - IR-77682

KW - subpixel resolution

KW - phase-shift measurement

KW - EWI-20322

KW - discrete Fourier transform

KW - Optical measurement

U2 - 10.1109/TRANSDUCERS.2011.5969574

DO - 10.1109/TRANSDUCERS.2011.5969574

M3 - Conference contribution

SN - 978-1-4577-0156-6

SP - 1697

EP - 1700

BT - 16th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '11

PB - IEEE

CY - USA

T2 - 16th International Solid-State Sensors, Actuators and Microsystems Conference

Y2 - 5 June 2011 through 9 June 2011

ER -