Substrate-inhibited ALD: interface formation and thin film properties

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 31 Mar 2006
Event	ALD Seminar - Eindhoven, the Netherlands Duration: 31 Mar 2006 → …

Keywords

@conference{64af1a6d30fa404aa654d533a1031cb7,

title = "Substrate-inhibited ALD: interface formation and thin film properties",

keywords = "METIS-235978",

author = "Sturm, \{Jacobus Marinus\} and A. Zinine and Herbert Wormeester and Bene Poelsema and R.G. Bankras and J. Holleman and Jurriaan Schmitz",

year = "2006",

month = mar,

day = "31",

language = "Undefined",

pages = "--",

note = "ALD Seminar ; Conference date: 31-03-2006",

}