Substrate recovery layers for EUVL optics: Effects on multilayer reflectivity and surface roughness
- I. Nedelcu*
- , R.W.E. van de Kruijs
- , A.E. Yakshin
- , E. Louis
- , F. Bijkerk
- , S. Muellender
*Corresponding author for this work
Research output: Contribution to journal › Conference article › Academic › peer-review