@inproceedings{21633dec5a934852903164e449708df5,
title = "Superconducting Micro Electro Mechanical Systems",
keywords = "METIS-221230",
author = "J. Ses{\'e} and R. Ebeling and Wiegerink, {Remco J.} and Jakob Flokstra",
year = "2004",
month = sep,
day = "14",
language = "Undefined",
isbn = "075030981-4",
publisher = "Institute of Physics Publishing",
number = "181",
pages = "3372--3378",
editor = "S Andreone and G.P Pepe and R Cristiano and G Masullo",
booktitle = "Proceedings of the 6th European Conference on Applied Superconductivity",
address = "United Kingdom",
note = "null ; Conference date: 14-09-2003 Through 18-09-2003",
}