Suppression of long wavelength reflection from Extreme UV multilayer optics

Qiushi Huang, Viacheslav Medvedev, Toine van den Boogaard, R. van der Meer, Robbert Wilhelmus Elisabeth van de Kruijs, Sebastiaan Huber, Hubertus M.J. Bastiaens, C. Bruineman, B. Vratsov, Eric Louis, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 20 Jun 2013
Event14th ASML Technology Conference 2013 - Hotel NH Eindhoven Conference Centre Koningshof, Eindhoven, Netherlands
Duration: 20 Jun 201320 Jun 2013
Conference number: 14

Conference

Conference14th ASML Technology Conference 2013
CountryNetherlands
CityEindhoven
Period20/06/1320/06/13

Keywords

  • METIS-299672

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