Suppression of long wavelength reflection from Extreme UV multilayer optics

Qiushi Huang, Viacheslav Medvedev, Toine van den Boogaard, R. van der Meer, Robbert Wilhelmus Elisabeth van de Kruijs, Sebastiaan Huber, Hubertus M.J. Bastiaens, C. Bruineman, B. Vratsov, Eric Louis, Frederik Bijkerk

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 20 Jun 2013
Event14th ASML Technology Conference 2013 - Hotel NH Eindhoven Conference Centre Koningshof, Eindhoven, Netherlands
Duration: 20 Jun 201320 Jun 2013
Conference number: 14

Conference

Conference14th ASML Technology Conference 2013
CountryNetherlands
CityEindhoven
Period20/06/1320/06/13

Keywords

  • METIS-299672

Cite this

Huang, Q., Medvedev, V., van den Boogaard, T., van der Meer, R., van de Kruijs, R. W. E., Huber, S., ... Bijkerk, F. (2013). Suppression of long wavelength reflection from Extreme UV multilayer optics. -. Poster session presented at 14th ASML Technology Conference 2013, Eindhoven, Netherlands.
Huang, Qiushi ; Medvedev, Viacheslav ; van den Boogaard, Toine ; van der Meer, R. ; van de Kruijs, Robbert Wilhelmus Elisabeth ; Huber, Sebastiaan ; Bastiaens, Hubertus M.J. ; Bruineman, C. ; Vratsov, B. ; Louis, Eric ; Bijkerk, Frederik. / Suppression of long wavelength reflection from Extreme UV multilayer optics. Poster session presented at 14th ASML Technology Conference 2013, Eindhoven, Netherlands.
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title = "Suppression of long wavelength reflection from Extreme UV multilayer optics",
keywords = "METIS-299672",
author = "Qiushi Huang and Viacheslav Medvedev and {van den Boogaard}, Toine and {van der Meer}, R. and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Sebastiaan Huber and Bastiaens, {Hubertus M.J.} and C. Bruineman and B. Vratsov and Eric Louis and Frederik Bijkerk",
year = "2013",
month = "6",
day = "20",
language = "Undefined",
pages = "--",
note = "null ; Conference date: 20-06-2013 Through 20-06-2013",

}

Huang, Q, Medvedev, V, van den Boogaard, T, van der Meer, R, van de Kruijs, RWE, Huber, S, Bastiaens, HMJ, Bruineman, C, Vratsov, B, Louis, E & Bijkerk, F 2013, 'Suppression of long wavelength reflection from Extreme UV multilayer optics' 14th ASML Technology Conference 2013, Eindhoven, Netherlands, 20/06/13 - 20/06/13, pp. -.

Suppression of long wavelength reflection from Extreme UV multilayer optics. / Huang, Qiushi; Medvedev, Viacheslav; van den Boogaard, Toine; van der Meer, R.; van de Kruijs, Robbert Wilhelmus Elisabeth; Huber, Sebastiaan; Bastiaens, Hubertus M.J.; Bruineman, C.; Vratsov, B.; Louis, Eric; Bijkerk, Frederik.

2013. - Poster session presented at 14th ASML Technology Conference 2013, Eindhoven, Netherlands.

Research output: Contribution to conferencePoster

TY - CONF

T1 - Suppression of long wavelength reflection from Extreme UV multilayer optics

AU - Huang, Qiushi

AU - Medvedev, Viacheslav

AU - van den Boogaard, Toine

AU - van der Meer, R.

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Huber, Sebastiaan

AU - Bastiaens, Hubertus M.J.

AU - Bruineman, C.

AU - Vratsov, B.

AU - Louis, Eric

AU - Bijkerk, Frederik

PY - 2013/6/20

Y1 - 2013/6/20

KW - METIS-299672

M3 - Poster

SP - -

ER -

Huang Q, Medvedev V, van den Boogaard T, van der Meer R, van de Kruijs RWE, Huber S et al. Suppression of long wavelength reflection from Extreme UV multilayer optics. 2013. Poster session presented at 14th ASML Technology Conference 2013, Eindhoven, Netherlands.