Suppression of long wavelength reflection from Extreme UV multilayer optics

Qiushi Huang; Viacheslav Medvedev; Toine van den Boogaard; R. van der Meer; Robbert Wilhelmus Elisabeth van de Kruijs; Sebastiaan Huber; Hubertus M.J. Bastiaens; C. Bruineman; B. Vratsov; Eric Louis; Frederik Bijkerk

Suppression of long wavelength reflection from Extreme UV multilayer optics

Qiushi Huang, Viacheslav Medvedev, Toine van den Boogaard, R. van der Meer, Robbert Wilhelmus Elisabeth van de Kruijs, Sebastiaan Huber, Hubertus M.J. Bastiaens, C. Bruineman, B. Vratsov, Eric Louis, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 20 Jun 2013
Event	14th ASML Technology Conference 2013 - Hotel NH Eindhoven Conference Centre Koningshof, Eindhoven, Netherlands Duration: 20 Jun 2013 → 20 Jun 2013 Conference number: 14

Conference

Conference	14th ASML Technology Conference 2013
Country/Territory	Netherlands
City	Eindhoven
Period	20/06/13 → 20/06/13

Keywords

METIS-299672

Cite this

@conference{23342ce9f9a049048f725b6584bb544a,

title = "Suppression of long wavelength reflection from Extreme UV multilayer optics",

keywords = "METIS-299672",

author = "Qiushi Huang and Viacheslav Medvedev and {van den Boogaard}, Toine and {van der Meer}, R. and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Sebastiaan Huber and Bastiaens, {Hubertus M.J.} and C. Bruineman and B. Vratsov and Eric Louis and Frederik Bijkerk",

year = "2013",

month = jun,

day = "20",

language = "Undefined",

pages = "--",

note = "14th ASML Technology Conference 2013 ; Conference date: 20-06-2013 Through 20-06-2013",

}

TY - CONF

T1 - Suppression of long wavelength reflection from Extreme UV multilayer optics

AU - Huang, Qiushi

AU - Medvedev, Viacheslav

AU - van den Boogaard, Toine

AU - van der Meer, R.

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Huber, Sebastiaan

AU - Bastiaens, Hubertus M.J.

AU - Bruineman, C.

AU - Vratsov, B.

AU - Louis, Eric

AU - Bijkerk, Frederik

N1 - Conference code: 14

PY - 2013/6/20

Y1 - 2013/6/20

KW - METIS-299672

M3 - Poster

SP - -

T2 - 14th ASML Technology Conference 2013

Y2 - 20 June 2013 through 20 June 2013

ER -