Suppression of long wavelength reflection from extreme-UV multilayer optics

Qiushi Huang, Toine van den Boogaard, Robbert Wilhelmus Elisabeth van de Kruijs, E. Zoethout, Viacheslav Medvedev, Eric Louis, Frederik Bijkerk

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Physics