Suppression of long wavelength reflection from Extreme UV multilayer optics

Qiushi Huang; Viacheslav Medvedev; Toine van den Boogaard; R. van der Meer; Robbert Wilhelmus Elisabeth van de Kruijs; Sebastiaan Huber; Hubertus M.J. Bastiaens; C. Bruineman; B. Vratsov; Eric Louis; Frederik Bijkerk

Suppression of long wavelength reflection from Extreme UV multilayer optics

Qiushi Huang
, Viacheslav Medvedev
, Toine van den Boogaard
, R. van der Meer
, Robbert Wilhelmus Elisabeth van de Kruijs
, Sebastiaan Huber
, Hubertus M.J. Bastiaens
, C. Bruineman
, B. Vratsov
, Eric Louis
, Frederik Bijkerk

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 20 Jun 2013
Event	14th ASML Technology Conference 2013 - Hotel NH Eindhoven Conference Centre Koningshof, Eindhoven, Netherlands Duration: 20 Jun 2013 → 20 Jun 2013 Conference number: 14

Conference

Conference	14th ASML Technology Conference 2013
Country/Territory	Netherlands
City	Eindhoven
Period	20/06/13 → 20/06/13

Keywords

METIS-299672

Cite this

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title = "Suppression of long wavelength reflection from Extreme UV multilayer optics",

keywords = "METIS-299672",

author = "Qiushi Huang and Viacheslav Medvedev and \{van den Boogaard\}, Toine and \{van der Meer\}, R. and \{van de Kruijs\}, \{Robbert Wilhelmus Elisabeth\} and Sebastiaan Huber and Bastiaens, \{Hubertus M.J.\} and C. Bruineman and B. Vratsov and Eric Louis and Frederik Bijkerk",

year = "2013",

month = jun,

day = "20",

language = "Undefined",

pages = "--",

note = "14th ASML Technology Conference 2013 ; Conference date: 20-06-2013 Through 20-06-2013",

}

TY - CONF

T1 - Suppression of long wavelength reflection from Extreme UV multilayer optics

AU - Huang, Qiushi

AU - Medvedev, Viacheslav

AU - van den Boogaard, Toine

AU - van der Meer, R.

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Huber, Sebastiaan

AU - Bastiaens, Hubertus M.J.

AU - Bruineman, C.

AU - Vratsov, B.

AU - Louis, Eric

AU - Bijkerk, Frederik

N1 - Conference code: 14

PY - 2013/6/20

Y1 - 2013/6/20

KW - METIS-299672

M3 - Poster

SP - -

T2 - 14th ASML Technology Conference 2013

Y2 - 20 June 2013 through 20 June 2013

ER -