Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

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Abstract

Ru and ZrN are candidate capping layers for applications such as catalysis, electronics and optical coatings: Ru exhibits a low resistivity, high thermal stability, excellent oxidation resistance and good diffusion capabilities. ZrN is thermally stable, and is known for its good mechanical properties. Although the oxidation process has been studied for both materials, the surface and especially the sub-surface oxidation is not properly understood and well addressed. We use the sub-monolayer surface sensitivity of the low energy ion scattering (LEIS) technique for in-situ monitoring of surface oxidation and determination of the oxygen sticking probabilities. From the LEIS in-depth signal, sub-nanometer sub-surface oxidation can be determined as a function of time and from these data oxygen diffusion constants can be extracted. These data support the applications for which adequate protecting surface films are required. i) Author to whom correspondence should be addressed. Electronic mail: r.colomaribera@utwente.nl
Original languageEnglish
Pages-
Publication statusPublished - 22 May 2014

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Scattering
Ions
Thin films
Oxidation
Oxygen
Optical coatings
Oxidation resistance
Electronic mail
Catalysis
Monolayers
Thermodynamic stability
Electronic equipment
Mechanical properties
Monitoring

Keywords

  • METIS-303556
  • IR-90718

Cite this

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title = "Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering",
abstract = "Ru and ZrN are candidate capping layers for applications such as catalysis, electronics and optical coatings: Ru exhibits a low resistivity, high thermal stability, excellent oxidation resistance and good diffusion capabilities. ZrN is thermally stable, and is known for its good mechanical properties. Although the oxidation process has been studied for both materials, the surface and especially the sub-surface oxidation is not properly understood and well addressed. We use the sub-monolayer surface sensitivity of the low energy ion scattering (LEIS) technique for in-situ monitoring of surface oxidation and determination of the oxygen sticking probabilities. From the LEIS in-depth signal, sub-nanometer sub-surface oxidation can be determined as a function of time and from these data oxygen diffusion constants can be extracted. These data support the applications for which adequate protecting surface films are required. i) Author to whom correspondence should be addressed. Electronic mail: r.colomaribera@utwente.nl",
keywords = "METIS-303556, IR-90718",
author = "{Coloma Ribera}, R. and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Sturm, {Jacobus Marinus} and Andrey Yakshin and Frederik Bijkerk",
note = "Poster",
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TY - CONF

T1 - Surface and sub-surface oxidation of thin films using Low Energy Ion Scattering

AU - Coloma Ribera, R.

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Sturm, Jacobus Marinus

AU - Yakshin, Andrey

AU - Bijkerk, Frederik

N1 - Poster

PY - 2014/5/22

Y1 - 2014/5/22

N2 - Ru and ZrN are candidate capping layers for applications such as catalysis, electronics and optical coatings: Ru exhibits a low resistivity, high thermal stability, excellent oxidation resistance and good diffusion capabilities. ZrN is thermally stable, and is known for its good mechanical properties. Although the oxidation process has been studied for both materials, the surface and especially the sub-surface oxidation is not properly understood and well addressed. We use the sub-monolayer surface sensitivity of the low energy ion scattering (LEIS) technique for in-situ monitoring of surface oxidation and determination of the oxygen sticking probabilities. From the LEIS in-depth signal, sub-nanometer sub-surface oxidation can be determined as a function of time and from these data oxygen diffusion constants can be extracted. These data support the applications for which adequate protecting surface films are required. i) Author to whom correspondence should be addressed. Electronic mail: r.colomaribera@utwente.nl

AB - Ru and ZrN are candidate capping layers for applications such as catalysis, electronics and optical coatings: Ru exhibits a low resistivity, high thermal stability, excellent oxidation resistance and good diffusion capabilities. ZrN is thermally stable, and is known for its good mechanical properties. Although the oxidation process has been studied for both materials, the surface and especially the sub-surface oxidation is not properly understood and well addressed. We use the sub-monolayer surface sensitivity of the low energy ion scattering (LEIS) technique for in-situ monitoring of surface oxidation and determination of the oxygen sticking probabilities. From the LEIS in-depth signal, sub-nanometer sub-surface oxidation can be determined as a function of time and from these data oxygen diffusion constants can be extracted. These data support the applications for which adequate protecting surface films are required. i) Author to whom correspondence should be addressed. Electronic mail: r.colomaribera@utwente.nl

KW - METIS-303556

KW - IR-90718

M3 - Poster

SP - -

ER -