Surface-charge-layer sheet-resistance measurements for evaluating interface RF losses on high-resistivity-silicon substrates

Physics

• Electrical Resistivity 100%
• Electric Potential 100%
• Substrates 100%
• Silicon 100%
• Parameter 33%
• Microwave 33%
• Field Effect Transistor 33%
• Independent Variables 33%
• Alternatives 33%
• Semiconductor 33%
• Capacitance 33%
• Increasing 33%
• Insulators 33%
• Metal 33%
• Attenuation 33%
• Retarding 33%
• Transmission Line 33%

Material Science

• Surface Charge 100%
• Silicon 100%
• Electrical Resistivity 100%
• Surface 66%
• Metal 33%
• Capacitance 33%
• Argon 33%
• Field Effect Transistors 33%
• Semiconductor Material 33%