Surface chemical state of sputtered Co-Cr films

T. Masuda; W.J.M.A. Geerts; J.C. Lodder

doi:10.1016/0304-8853(91)90223-W

Surface chemical state of sputtered Co-Cr films

T. Masuda, W.J.M.A. Geerts, J.C. Lodder

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Abstract

Surface oxidation states of sputtered Co80Cr20 (at%) films were studied by performing Auger Electron Spectroscopy (AES) and X-ray Photoemission Spectroscopy (XPS). Seven samples having different thicknesses (from 50 to 1000 nm) which were grown under the same conditions have been studied. It was found from these experiments that among all the films the initial oxidation occured in the Cr; the the following diffusion of the Co was observed at the top layer. Consequently the surface consists of a four-layered structure. A weak thickness dependence in the films of the oxidized region was found from the results of AES measurements. The change of the saturation magnetization through the sample was calculated using the results of AES and XPS data. These calculations show that a region with enhanced saturation magnetization can be expected under the non-ferromagnetic top layer.

Original language	English
Pages (from-to)	123-132
Number of pages	10
Journal	Journal of magnetism and magnetic materials
Volume	95
Issue number	1
DOIs	https://doi.org/10.1016/0304-8853(91)90223-W
Publication status	Published - 1991
Event	CAMST General Meeting 1990 - University of Twente, Enschede, Netherlands Duration: 31 May 1990 → 1 Jun 1990

Keywords

SMI-TST: From 2006 in EWI-TST
SMI-MAT: MATERIALS

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10.1016/0304-8853(91)90223-W

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title = "Surface chemical state of sputtered Co-Cr films",

abstract = "Surface oxidation states of sputtered Co80Cr20 (at%) films were studied by performing Auger Electron Spectroscopy (AES) and X-ray Photoemission Spectroscopy (XPS). Seven samples having different thicknesses (from 50 to 1000 nm) which were grown under the same conditions have been studied. It was found from these experiments that among all the films the initial oxidation occured in the Cr; the the following diffusion of the Co was observed at the top layer. Consequently the surface consists of a four-layered structure. A weak thickness dependence in the films of the oxidized region was found from the results of AES measurements. The change of the saturation magnetization through the sample was calculated using the results of AES and XPS data. These calculations show that a region with enhanced saturation magnetization can be expected under the non-ferromagnetic top layer.",

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author = "T. Masuda and W.J.M.A. Geerts and J.C. Lodder",

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doi = "10.1016/0304-8853(91)90223-W",

language = "English",

volume = "95",

pages = "123--132",

journal = "Journal of magnetism and magnetic materials",

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number = "1",

note = "CAMST General Meeting 1990 ; Conference date: 31-05-1990 Through 01-06-1990",

}

TY - JOUR

T1 - Surface chemical state of sputtered Co-Cr films

AU - Masuda, T.

AU - Geerts, W.J.M.A.

AU - Lodder, J.C.

PY - 1991

Y1 - 1991

N2 - Surface oxidation states of sputtered Co80Cr20 (at%) films were studied by performing Auger Electron Spectroscopy (AES) and X-ray Photoemission Spectroscopy (XPS). Seven samples having different thicknesses (from 50 to 1000 nm) which were grown under the same conditions have been studied. It was found from these experiments that among all the films the initial oxidation occured in the Cr; the the following diffusion of the Co was observed at the top layer. Consequently the surface consists of a four-layered structure. A weak thickness dependence in the films of the oxidized region was found from the results of AES measurements. The change of the saturation magnetization through the sample was calculated using the results of AES and XPS data. These calculations show that a region with enhanced saturation magnetization can be expected under the non-ferromagnetic top layer.

AB - Surface oxidation states of sputtered Co80Cr20 (at%) films were studied by performing Auger Electron Spectroscopy (AES) and X-ray Photoemission Spectroscopy (XPS). Seven samples having different thicknesses (from 50 to 1000 nm) which were grown under the same conditions have been studied. It was found from these experiments that among all the films the initial oxidation occured in the Cr; the the following diffusion of the Co was observed at the top layer. Consequently the surface consists of a four-layered structure. A weak thickness dependence in the films of the oxidized region was found from the results of AES measurements. The change of the saturation magnetization through the sample was calculated using the results of AES and XPS data. These calculations show that a region with enhanced saturation magnetization can be expected under the non-ferromagnetic top layer.

KW - SMI-TST: From 2006 in EWI-TST

KW - SMI-MAT: MATERIALS

U2 - 10.1016/0304-8853(91)90223-W

DO - 10.1016/0304-8853(91)90223-W

M3 - Article

SN - 0304-8853

VL - 95

SP - 123

EP - 132

JO - Journal of magnetism and magnetic materials

JF - Journal of magnetism and magnetic materials

IS - 1

T2 - CAMST General Meeting 1990

Y2 - 31 May 1990 through 1 June 1990

ER -

Surface chemical state of sputtered Co-Cr films

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