Surface chemical state of sputtered Co-Cr films

T. Masuda, W.J.M.A. Geerts, J.C. Lodder

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    Abstract

    Surface oxidation states of sputtered Co80Cr20 (at%) films were studied by performing Auger Electron Spectroscopy (AES) and X-ray Photoemission Spectroscopy (XPS). Seven samples having different thicknesses (from 50 to 1000 nm) which were grown under the same conditions have been studied. It was found from these experiments that among all the films the initial oxidation occured in the Cr; the the following diffusion of the Co was observed at the top layer. Consequently the surface consists of a four-layered structure. A weak thickness dependence in the films of the oxidized region was found from the results of AES measurements. The change of the saturation magnetization through the sample was calculated using the results of AES and XPS data. These calculations show that a region with enhanced saturation magnetization can be expected under the non-ferromagnetic top layer.
    Original languageEnglish
    Pages (from-to)123-132
    Number of pages10
    JournalJournal of magnetism and magnetic materials
    Volume95
    Issue number1
    DOIs
    Publication statusPublished - 1991
    EventCAMST General Meeting 1990 - University of Twente, Enschede, Netherlands
    Duration: 31 May 19901 Jun 1990

    Keywords

    • SMI-TST: From 2006 in EWI-TST
    • SMI-MAT: MATERIALS

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