Surface forces in micromachined structures

P.R. Scheeper, J.A. Voorthuyzen, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProc. Micromechanics Europe '90
    Place of PublicationBerlijn
    Pages47-52
    Number of pages6
    Publication statusPublished - 26 Nov 1990

    Keywords

    • METIS-114170

    Cite this

    Scheeper, P. R., Voorthuyzen, J. A., & Bergveld, P. (1990). Surface forces in micromachined structures. In Proc. Micromechanics Europe '90 (pp. 47-52). Berlijn.