Surface forces in micromachined structures

P.R. Scheeper, J.A. Voorthuyzen, Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProc. Micromechanics Europe '90
    Place of PublicationBerlijn
    Pages47-52
    Number of pages6
    Publication statusPublished - 26 Nov 1990

    Keywords

    • METIS-114170

    Cite this

    Scheeper, P. R., Voorthuyzen, J. A., & Bergveld, P. (1990). Surface forces in micromachined structures. In Proc. Micromechanics Europe '90 (pp. 47-52). Berlijn.
    Scheeper, P.R. ; Voorthuyzen, J.A. ; Bergveld, Piet. / Surface forces in micromachined structures. Proc. Micromechanics Europe '90. Berlijn, 1990. pp. 47-52
    @inproceedings{f68d9249509c46c09650f6e82ceb6172,
    title = "Surface forces in micromachined structures",
    keywords = "METIS-114170",
    author = "P.R. Scheeper and J.A. Voorthuyzen and Piet Bergveld",
    year = "1990",
    month = "11",
    day = "26",
    language = "Undefined",
    pages = "47--52",
    booktitle = "Proc. Micromechanics Europe '90",

    }

    Scheeper, PR, Voorthuyzen, JA & Bergveld, P 1990, Surface forces in micromachined structures. in Proc. Micromechanics Europe '90. Berlijn, pp. 47-52.

    Surface forces in micromachined structures. / Scheeper, P.R.; Voorthuyzen, J.A.; Bergveld, Piet.

    Proc. Micromechanics Europe '90. Berlijn, 1990. p. 47-52.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Surface forces in micromachined structures

    AU - Scheeper, P.R.

    AU - Voorthuyzen, J.A.

    AU - Bergveld, Piet

    PY - 1990/11/26

    Y1 - 1990/11/26

    KW - METIS-114170

    M3 - Conference contribution

    SP - 47

    EP - 52

    BT - Proc. Micromechanics Europe '90

    CY - Berlijn

    ER -

    Scheeper PR, Voorthuyzen JA, Bergveld P. Surface forces in micromachined structures. In Proc. Micromechanics Europe '90. Berlijn. 1990. p. 47-52