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Surface forces in micromachined structures

  • P.R. Scheeper
  • , J.A. Voorthuyzen
  • , Piet Bergveld

    Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

    Original languageUndefined
    Title of host publicationProc. Micromechanics Europe '90
    Place of PublicationBerlijn
    Pages47-52
    Number of pages6
    Publication statusPublished - 26 Nov 1990

    Keywords

    • METIS-114170

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