Surface micromachined linear electrostatic stepper motor

Niels Roelof Tas, A.H. Sonnenberg, A.F.M. Sander, A.F.M. Sander, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    25 Citations (Scopus)
    192 Downloads (Pure)

    Abstract

    A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage
    Original languageUndefined
    Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages215-220
    Number of pages6
    ISBN (Print)0-7803-3744-1
    DOIs
    Publication statusPublished - 26 Jan 1997
    Event12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States
    Duration: 17 Jan 199921 Jan 1999
    Conference number: 12

    Conference

    Conference12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
    Abbreviated titleMEMS
    CountryUnited States
    CityOrlando
    Period17/01/9921/01/99

    Keywords

    • METIS-112883
    • IR-16001
    • EWI-13269

    Cite this

    Tas, N. R., Sonnenberg, A. H., Sander, A. F. M., Sander, A. F. M., & Elwenspoek, M. C. (1997). Surface micromachined linear electrostatic stepper motor. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 215-220). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.1997.581806