Surface micromachined linear electrostatic stepper motor

Niels Roelof Tas, A.H. Sonnenberg, A.F.M. Sander, A.F.M. Sander, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

25 Citations (Scopus)
156 Downloads (Pure)

Abstract

A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage
Original languageUndefined
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of PublicationPiscataway
PublisherIEEE Computer Society
Pages215-220
Number of pages6
ISBN (Print)0-7803-3744-1
DOIs
Publication statusPublished - 26 Jan 1997
Event12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States
Duration: 17 Jan 199921 Jan 1999
Conference number: 12

Conference

Conference12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
Abbreviated titleMEMS
CountryUnited States
CityOrlando
Period17/01/9921/01/99

Keywords

  • METIS-112883
  • IR-16001
  • EWI-13269

Cite this

Tas, N. R., Sonnenberg, A. H., Sander, A. F. M., Sander, A. F. M., & Elwenspoek, M. C. (1997). Surface micromachined linear electrostatic stepper motor. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 215-220). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.1997.581806
Tas, Niels Roelof ; Sonnenberg, A.H. ; Sander, A.F.M. ; Sander, A.F.M. ; Elwenspoek, Michael Curt. / Surface micromachined linear electrostatic stepper motor. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway : IEEE Computer Society, 1997. pp. 215-220
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abstract = "A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage",
keywords = "METIS-112883, IR-16001, EWI-13269",
author = "Tas, {Niels Roelof} and A.H. Sonnenberg and A.F.M. Sander and A.F.M. Sander and Elwenspoek, {Michael Curt}",
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booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",
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Tas, NR, Sonnenberg, AH, Sander, AFM, Sander, AFM & Elwenspoek, MC 1997, Surface micromachined linear electrostatic stepper motor. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE Computer Society, Piscataway, pp. 215-220, 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, United States, 17/01/99. https://doi.org/10.1109/MEMSYS.1997.581806

Surface micromachined linear electrostatic stepper motor. / Tas, Niels Roelof; Sonnenberg, A.H.; Sander, A.F.M.; Sander, A.F.M.; Elwenspoek, Michael Curt.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway : IEEE Computer Society, 1997. p. 215-220.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Surface micromachined linear electrostatic stepper motor

AU - Tas, Niels Roelof

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AU - Sander, A.F.M.

AU - Elwenspoek, Michael Curt

PY - 1997/1/26

Y1 - 1997/1/26

N2 - A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage

AB - A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage

KW - METIS-112883

KW - IR-16001

KW - EWI-13269

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Tas NR, Sonnenberg AH, Sander AFM, Sander AFM, Elwenspoek MC. Surface micromachined linear electrostatic stepper motor. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway: IEEE Computer Society. 1997. p. 215-220 https://doi.org/10.1109/MEMSYS.1997.581806