Abstract
| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Place of Publication | Piscataway |
| Publisher | IEEE Computer Society |
| Pages | 215-220 |
| Number of pages | 6 |
| ISBN (Print) | 0-7803-3744-1 |
| DOIs | |
| Publication status | Published - 26 Jan 1997 |
| Event | 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States Duration: 17 Jan 1999 → 21 Jan 1999 Conference number: 12 |
Conference
| Conference | 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 |
|---|---|
| Abbreviated title | MEMS |
| Country | United States |
| City | Orlando |
| Period | 17/01/99 → 21/01/99 |
Keywords
- METIS-112883
- IR-16001
- EWI-13269
Cite this
}
Surface micromachined linear electrostatic stepper motor. / Tas, Niels Roelof; Sonnenberg, A.H.; Sander, A.F.M.; Sander, A.F.M.; Elwenspoek, Michael Curt.
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway : IEEE Computer Society, 1997. p. 215-220.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - Surface micromachined linear electrostatic stepper motor
AU - Tas, Niels Roelof
AU - Sonnenberg, A.H.
AU - Sander, A.F.M.
AU - Sander, A.F.M.
AU - Elwenspoek, Michael Curt
PY - 1997/1/26
Y1 - 1997/1/26
N2 - A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage
AB - A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage
KW - METIS-112883
KW - IR-16001
KW - EWI-13269
U2 - 10.1109/MEMSYS.1997.581806
DO - 10.1109/MEMSYS.1997.581806
M3 - Conference contribution
SN - 0-7803-3744-1
SP - 215
EP - 220
BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
PB - IEEE Computer Society
CY - Piscataway
ER -