Surface micromachined linear electrostatic stepper motor

Niels Roelof Tas; A.H. Sonnenberg; A.F.M. Sander; A.F.M. Sander; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.1997.581806

Surface micromachined linear electrostatic stepper motor

Niels Roelof Tas, A.H. Sonnenberg, A.F.M. Sander, A.F.M. Sander, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

25 Citations (Scopus)

192 Downloads (Pure)

Abstract

A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage

Original language	Undefined
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway
Publisher	IEEE Computer Society
Pages	215-220
Number of pages	6
ISBN (Print)	0-7803-3744-1
DOIs	https://doi.org/10.1109/MEMSYS.1997.581806
Publication status	Published - 26 Jan 1997
Event	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States Duration: 17 Jan 1999 → 21 Jan 1999 Conference number: 12

Conference

Conference	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
Abbreviated title	MEMS
Country	United States
City	Orlando
Period	17/01/99 → 21/01/99

Keywords

METIS-112883
IR-16001
EWI-13269

Access to Document

10.1109/MEMSYS.1997.581806

surface_micromachined
open
PMEMS_250
open

Cite this

Tas, N. R., Sonnenberg, A. H., Sander, A. F. M., Sander, A. F. M., & Elwenspoek, M. C. (1997). Surface micromachined linear electrostatic stepper motor. In Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) (pp. 215-220). Piscataway: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.1997.581806

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abstract = "A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage",

keywords = "METIS-112883, IR-16001, EWI-13269",

author = "Tas, {Niels Roelof} and A.H. Sonnenberg and A.F.M. Sander and A.F.M. Sander and Elwenspoek, {Michael Curt}",

year = "1997",

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doi = "10.1109/MEMSYS.1997.581806",

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Tas, NR, Sonnenberg, AH, Sander, AFM, Sander, AFM & Elwenspoek, MC 1997, Surface micromachined linear electrostatic stepper motor. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE Computer Society, Piscataway, pp. 215-220, 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, United States, 17/01/99. https://doi.org/10.1109/MEMSYS.1997.581806

Surface micromachined linear electrostatic stepper motor. / Tas, Niels Roelof; Sonnenberg, A.H.; Sander, A.F.M.; Sander, A.F.M.; Elwenspoek, Michael Curt.

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). Piscataway : IEEE Computer Society, 1997. p. 215-220.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Elwenspoek, Michael Curt

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N2 - A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage

AB - A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage

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