Surface micromachined linear electrostatic stepper motor

Niels Roelof Tas; A.H. Sonnenberg; A.F.M. Sander; A.F.M. Sander; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.1997.581806

Surface micromachined linear electrostatic stepper motor

Niels Roelof Tas
, A.H. Sonnenberg
, A.F.M. Sander
, A.F.M. Sander
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

29 Citations (Scopus)

558 Downloads (Pure)

Abstract

A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage

Original language	Undefined
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway
Publisher	IEEE
Pages	215-220
Number of pages	6
ISBN (Print)	0-7803-3744-1
DOIs	https://doi.org/10.1109/MEMSYS.1997.581806
Publication status	Published - 26 Jan 1997
Event	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 - Orlando, United States Duration: 17 Jan 1999 → 21 Jan 1999 Conference number: 12

Conference

Conference	12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999
Abbreviated title	MEMS
Country/Territory	United States
City	Orlando
Period	17/01/99 → 21/01/99

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

METIS-112883
IR-16001
EWI-13269

Access to Document

10.1109/MEMSYS.1997.581806

Cite this

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title = "Surface micromachined linear electrostatic stepper motor",

abstract = "A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage",

keywords = "METIS-112883, IR-16001, EWI-13269",

author = "Tas, \{Niels Roelof\} and A.H. Sonnenberg and A.F.M. Sander and A.F.M. Sander and Elwenspoek, \{Michael Curt\}",

year = "1997",

month = jan,

day = "26",

doi = "10.1109/MEMSYS.1997.581806",

language = "Undefined",

isbn = "0-7803-3744-1",

pages = "215--220",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

note = "12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999 ; Conference date: 17-01-1999 Through 21-01-1999",

}

Tas, NR, Sonnenberg, AH, Sander, AFM, Sander, AFM & Elwenspoek, MC 1997, Surface micromachined linear electrostatic stepper motor. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, pp. 215-220, 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999, Orlando, Florida, United States, 17/01/99. https://doi.org/10.1109/MEMSYS.1997.581806

TY - GEN

T1 - Surface micromachined linear electrostatic stepper motor

AU - Tas, Niels Roelof

AU - Sonnenberg, A.H.

AU - Sander, A.F.M.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 12

PY - 1997/1/26

Y1 - 1997/1/26

N2 - A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage

AB - A linear electrostatic stepper motor has been designed and fabricated in a single mask surface micromachining process. It consists of two drive units that alternately generate a step to move the shuttle. The friction and adhesion in the clamps has been measured. A friction coefficient of 0.8±0.3 has been found. The adhesion in the clamp is just low enough to release the clamping shoe. Stepping cycles have been performed successfully to obtain a deflection of 15 μm, with steps in the order of 2 μm. The deflection is limited by the suspension. The generated force equals 3 μN at 40 V driving voltage

KW - METIS-112883

KW - IR-16001

KW - EWI-13269

U2 - 10.1109/MEMSYS.1997.581806

DO - 10.1109/MEMSYS.1997.581806

M3 - Conference contribution

SN - 0-7803-3744-1

SP - 215

EP - 220

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway

T2 - 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 1999

Y2 - 17 January 1999 through 21 January 1999

ER -