Abstract
The research work was mainly focused on the surface modification/surface
functionalization of active-gate areas of silicon nanowire field-effect transistor
devices (Si-NW FET) using hydrogen terminated surfaces, Si-C and Si-N bonded
monolayers and subsequent bioimmobilization for biosensor applications.
Experiments were conducted on planar silicon samples for contact angle
measurements and x-ray photoelectron spectroscopy (XPS) for the confirmation of
step wise surface modification process. Efficiency of surface
amendments/modification on Si-NW FET devices was tested and monitored by
scanning electron microscopy (SEM), fluorescence spectroscopy, and atomic force
microscopy (AFM) as well as electrical measurements by front and back gating the
devices in air and in aqueous solutions. Contact angle measurements are very good
to have an immediate idea of surface physical property in terms of hydrophobicity
or hydrophilicity. ...
Original language | English |
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Qualification | Doctor of Philosophy |
Awarding Institution |
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Supervisors/Advisors |
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Thesis sponsors | |
Award date | 24 Nov 2011 |
Place of Publication | Zutphen |
Publisher | |
Print ISBNs | 978-90-365-3283-9 |
DOIs | |
Publication status | Published - 24 Nov 2011 |
Keywords
- METIS-281586
- EWI-20871
- IR-78497