Surface modification of ZrO2 - Y2O3 ss by ion implantation

D. Scholten; A.J. Burggraaf

doi:10.1016/0167-2738(85)90037-2

Surface modification of ZrO₂ - Y₂O₃ ss by ion implantation

D. Scholten, A.J. Burggraaf

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Abstract

With ⁵⁶Fe⁺ implantations in oxygen ion conducting solid solutions of 0.86ZrO₂-0.14YO_1.5 [ZY14] electronic conductivity is introduced in a surface layer of less than 70 nm.

The theoretically expected Gaussian distributions of Fe ions as calculated by computer simulation are compared with results of analyses by AES and RBS. Mean projected ranges (Rp) agree but remarkable differences in peakheight and halfwidth are found.

Surface concentrations up to 6^∗10²¹ ZY Fe/cm³ have been achieved using mediate doses of 2–4^∗10¹⁶ Fe/cm² and energies ranging from 15–110 KeV. Concurrent sputtering during high dose implantations (8–40^∗10¹⁶ Fe/cm², 15 and 110 KeV) causes a peakshift towards the solid-gas surface. With these high doses high concentrations up to 24^∗10²¹ Fe/cm³ were obtained.

The implanted profile shapes remain stable under heat treatments up to 900°C. Higher temperatures cause a decrease in topconcentration and broadening of the distribution. After annealing during 25 hrs. at 1500°C all implanted iron was dissolved in the ZY matrix and no precipitates were formed as indicated by XRD.

Original language	English
Pages (from-to)	147-153
Journal	Solid state ionics
Volume	16
DOIs	https://doi.org/10.1016/0167-2738(85)90037-2
Publication status	Published - 1985

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title = "Surface modification of ZrO2 - Y2O3 ss by ion implantation",

abstract = "With 56Fe+ implantations in oxygen ion conducting solid solutions of 0.86ZrO2-0.14YO1.5 [ZY14] electronic conductivity is introduced in a surface layer of less than 70 nm.The theoretically expected Gaussian distributions of Fe ions as calculated by computer simulation are compared with results of analyses by AES and RBS. Mean projected ranges (Rp) agree but remarkable differences in peakheight and halfwidth are found.Surface concentrations up to 6∗1021 ZY Fe/cm3 have been achieved using mediate doses of 2–4∗1016 Fe/cm2 and energies ranging from 15–110 KeV. Concurrent sputtering during high dose implantations (8–40∗1016 Fe/cm2, 15 and 110 KeV) causes a peakshift towards the solid-gas surface. With these high doses high concentrations up to 24∗1021 Fe/cm3 were obtained.The implanted profile shapes remain stable under heat treatments up to 900°C. Higher temperatures cause a decrease in topconcentration and broadening of the distribution. After annealing during 25 hrs. at 1500°C all implanted iron was dissolved in the ZY matrix and no precipitates were formed as indicated by XRD.",

author = "D. Scholten and A.J. Burggraaf",

year = "1985",

doi = "10.1016/0167-2738(85)90037-2",

language = "English",

volume = "16",

pages = "147--153",

journal = "Solid state ionics",

issn = "0167-2738",

publisher = "Elsevier",

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TY - JOUR

T1 - Surface modification of ZrO2 - Y2O3 ss by ion implantation

AU - Scholten, D.

AU - Burggraaf, A.J.

PY - 1985

Y1 - 1985

N2 - With 56Fe+ implantations in oxygen ion conducting solid solutions of 0.86ZrO2-0.14YO1.5 [ZY14] electronic conductivity is introduced in a surface layer of less than 70 nm.The theoretically expected Gaussian distributions of Fe ions as calculated by computer simulation are compared with results of analyses by AES and RBS. Mean projected ranges (Rp) agree but remarkable differences in peakheight and halfwidth are found.Surface concentrations up to 6∗1021 ZY Fe/cm3 have been achieved using mediate doses of 2–4∗1016 Fe/cm2 and energies ranging from 15–110 KeV. Concurrent sputtering during high dose implantations (8–40∗1016 Fe/cm2, 15 and 110 KeV) causes a peakshift towards the solid-gas surface. With these high doses high concentrations up to 24∗1021 Fe/cm3 were obtained.The implanted profile shapes remain stable under heat treatments up to 900°C. Higher temperatures cause a decrease in topconcentration and broadening of the distribution. After annealing during 25 hrs. at 1500°C all implanted iron was dissolved in the ZY matrix and no precipitates were formed as indicated by XRD.

AB - With 56Fe+ implantations in oxygen ion conducting solid solutions of 0.86ZrO2-0.14YO1.5 [ZY14] electronic conductivity is introduced in a surface layer of less than 70 nm.The theoretically expected Gaussian distributions of Fe ions as calculated by computer simulation are compared with results of analyses by AES and RBS. Mean projected ranges (Rp) agree but remarkable differences in peakheight and halfwidth are found.Surface concentrations up to 6∗1021 ZY Fe/cm3 have been achieved using mediate doses of 2–4∗1016 Fe/cm2 and energies ranging from 15–110 KeV. Concurrent sputtering during high dose implantations (8–40∗1016 Fe/cm2, 15 and 110 KeV) causes a peakshift towards the solid-gas surface. With these high doses high concentrations up to 24∗1021 Fe/cm3 were obtained.The implanted profile shapes remain stable under heat treatments up to 900°C. Higher temperatures cause a decrease in topconcentration and broadening of the distribution. After annealing during 25 hrs. at 1500°C all implanted iron was dissolved in the ZY matrix and no precipitates were formed as indicated by XRD.

U2 - 10.1016/0167-2738(85)90037-2

DO - 10.1016/0167-2738(85)90037-2

M3 - Article

SN - 0167-2738

VL - 16

SP - 147

EP - 153

JO - Solid state ionics

JF - Solid state ionics

ER -

Surface modification of ZrO2 - Y2O3 ss by ion implantation

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Surface modification of ZrO₂ - Y₂O₃ ss by ion implantation