Surface modification of ZrO2 - Y2O3 ss by ion implantation

D. Scholten, A.J. Burggraaf

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With 56Fe+ implantations in oxygen ion conducting solid solutions of 0.86ZrO2-0.14YO1.5 [ZY14] electronic conductivity is introduced in a surface layer of less than 70 nm.

The theoretically expected Gaussian distributions of Fe ions as calculated by computer simulation are compared with results of analyses by AES and RBS. Mean projected ranges (Rp) agree but remarkable differences in peakheight and halfwidth are found.

Surface concentrations up to 61021 ZY Fe/cm3 have been achieved using mediate doses of 2–41016 Fe/cm2 and energies ranging from 15–110 KeV. Concurrent sputtering during high dose implantations (8–401016 Fe/cm2, 15 and 110 KeV) causes a peakshift towards the solid-gas surface. With these high doses high concentrations up to 241021 Fe/cm3 were obtained.

The implanted profile shapes remain stable under heat treatments up to 900°C. Higher temperatures cause a decrease in topconcentration and broadening of the distribution. After annealing during 25 hrs. at 1500°C all implanted iron was dissolved in the ZY matrix and no precipitates were formed as indicated by XRD.
Original languageEnglish
Pages (from-to)147-153
JournalSolid state ionics
Publication statusPublished - 1985


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