Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS

G.M. Kim, B.G. Kim, M. Liebau, Jurriaan Huskens, David Reinhoudt, J. Brugger

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	175-181
Number of pages	7
Journal	Journal of microelectromechanical systems
Volume	11
Publication status	Published - 2002

Keywords

@article{de2a73b10f414bd5adef7888b52f3c8c,

title = "Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS",

keywords = "METIS-243476",

author = "G.M. Kim and B.G. Kim and M. Liebau and Jurriaan Huskens and David Reinhoudt and J. Brugger",

year = "2002",

language = "Undefined",

volume = "11",

pages = "175--181",

journal = "Journal of microelectromechanical systems",

issn = "1057-7157",

publisher = "IEEE",

}

TY - JOUR

T1 - Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS

AU - Kim, G.M.

AU - Kim, B.G.

AU - Liebau, M.

AU - Huskens, Jurriaan

AU - Reinhoudt, David

AU - Brugger, J.

PY - 2002

Y1 - 2002

KW - METIS-243476

M3 - Article

VL - 11

SP - 175

EP - 181

JO - Journal of microelectromechanical systems

JF - Journal of microelectromechanical systems

SN - 1057-7157

ER -