Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS

G.M. Kim, B.G. Kim, M. Liebau, Jurriaan Huskens, David Reinhoudt, J. Brugger

Research output: Contribution to journal › Article › Academic › peer-review

Original language	English
Pages (from-to)	175-181
Number of pages	7
Journal	Journal of microelectromechanical systems
Volume	11
Publication status	Published - 2002

Keywords

This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS",

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T1 - Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS

AU - Kim, G.M.

AU - Kim, B.G.

AU - Liebau, M.

AU - Huskens, Jurriaan

AU - Reinhoudt, David

AU - Brugger, J.

PY - 2002

Y1 - 2002

KW - METIS-243476

M3 - Article

SN - 1057-7157

VL - 11

SP - 175

EP - 181

JO - Journal of microelectromechanical systems

JF - Journal of microelectromechanical systems

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