Surface modification with self-assembled monolayers for nanoscale replication of photoplastic MEMS

G.M. Kim, B.G. Kim, M. Liebau, Jurriaan Huskens, David Reinhoudt, J. Brugger

Research output: Contribution to journalArticleAcademicpeer-review

30 Citations (Scopus)
Original languageUndefined
Pages (from-to)175-181
Number of pages7
JournalJournal of microelectromechanical systems
Volume11
Publication statusPublished - 2002

Keywords

  • METIS-243476

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