Original language | Undefined |
---|---|
Pages (from-to) | 175-181 |
Number of pages | 7 |
Journal | Journal of microelectromechanical systems |
Volume | 11 |
Publication status | Published - 2002 |
Keywords
- METIS-243476
G.M. Kim, B.G. Kim, M. Liebau, Jurriaan Huskens, David Reinhoudt, J. Brugger
Research output: Contribution to journal › Article › Academic › peer-review
Original language | Undefined |
---|---|
Pages (from-to) | 175-181 |
Number of pages | 7 |
Journal | Journal of microelectromechanical systems |
Volume | 11 |
Publication status | Published - 2002 |