Surface morphologies of excimer-laser annealed BF2+ implanted Si diodes

A. Burtsev*, H. Schut, L. K. Nanver, A. Van Veen, J. Slabbekoorn, T. L.M. Scholtes

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Surface morphologies of excimer-laser annealed BF<sub>2</sub><sup>+</sup> implanted Si diodes'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy