Surface Morphology of Copper after Chemical Mechanical Polishing

V. Nguyen Hoang, H. van Kranenburg, P.H. Woerlee

    Research output: Other contributionOther research output

    Original languageUndefined
    Place of PublicationAmeland, The Netherlands
    Publication statusPublished - 13 Sep 1999

    Keywords

    • METIS-114854

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