Surface-passivated high-resistivity silicon substrates for RFICs

B. Rong*, J. N. Burghartz, L. K. Nanver, B. Rejaei, M. Van Der Zwan

*Corresponding author for this work

Research output: Contribution to journalLetterAcademicpeer-review

91 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science