For high Tc superconducting multilayer applications, smooth interfaces between the individual layers are required. However, in general, e.g., YBaCuO grows in a 3D screw-dislocation or island nucleation growth mode, introducing a surface roughness. In this contribution we study the surface layer roughness as a function of different deposition techniques as well as deposition parameters. Special attention will be paid to the increase in film roughness with increasing film thickness. For these studies we used scanning probe microscopy. From these experiments, we obtained an island density decreasing with a square root dependence on the film thickness. Furthermore, height-height correlations indicate that the film growth can be described by a ballistic growth process, with very limited effective surface diffusion. The correlation lengths ¿ are on the order of the island size, inferring that the island size forms the mean diffusion barrier. This results in a representation of non-correlated islands, which can be considered as autonomous systems.