Surface roughness improvements of Tungsten LPCVD

A. Hasper, J. Holleman, J. Middelhoek

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

    Original languageEnglish
    Title of host publicationTungsten and other advanced metals for VLSI applications in 1990
    Subtitle of host publicationproceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.
    EditorsGregory C. Smith, Roc Blumenthal
    Place of PublicationPittsburg, PA
    PublisherMaterials Research Society
    Pages317-325
    Number of pages8
    ISBN (Print)1-55899-112-3
    Publication statusPublished - 1991
    Event7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990 - Dallas, United States
    Duration: 22 Oct 199024 Oct 1990
    Conference number: 7

    Publication series

    NameMRS Conference Proceedings
    PublisherMaterials Research Society (MRS)
    ISSN (Print)0886-7860

    Workshop

    Workshop7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990
    CountryUnited States
    CityDallas
    Period22/10/9024/10/90

    Keywords

    • METIS-112457

    Cite this

    Hasper, A., Holleman, J., & Middelhoek, J. (1991). Surface roughness improvements of Tungsten LPCVD. In G. C. Smith, & R. Blumenthal (Eds.), Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A. (pp. 317-325). (MRS Conference Proceedings). Pittsburg, PA: Materials Research Society.