Surface roughness improvements of Tungsten LPCVD

A. Hasper, J. Holleman, J. Middelhoek

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

    Original languageEnglish
    Title of host publicationTungsten and other advanced metals for VLSI applications in 1990
    Subtitle of host publicationproceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.
    EditorsGregory C. Smith, Roc Blumenthal
    Place of PublicationPittsburg, PA
    PublisherMaterials Research Society
    Pages317-325
    Number of pages8
    ISBN (Print)1-55899-112-3
    Publication statusPublished - 1991
    Event7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990 - Dallas, United States
    Duration: 22 Oct 199024 Oct 1990
    Conference number: 7

    Publication series

    NameMRS Conference Proceedings
    PublisherMaterials Research Society (MRS)
    ISSN (Print)0886-7860

    Workshop

    Workshop7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990
    CountryUnited States
    CityDallas
    Period22/10/9024/10/90

    Keywords

    • METIS-112457

    Cite this

    Hasper, A., Holleman, J., & Middelhoek, J. (1991). Surface roughness improvements of Tungsten LPCVD. In G. C. Smith, & R. Blumenthal (Eds.), Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A. (pp. 317-325). (MRS Conference Proceedings). Pittsburg, PA: Materials Research Society.
    Hasper, A. ; Holleman, J. ; Middelhoek, J. / Surface roughness improvements of Tungsten LPCVD. Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.. editor / Gregory C. Smith ; Roc Blumenthal. Pittsburg, PA : Materials Research Society, 1991. pp. 317-325 (MRS Conference Proceedings).
    @inbook{ab95e5b65fde43c587ffd5547d9fafd6,
    title = "Surface roughness improvements of Tungsten LPCVD",
    keywords = "METIS-112457",
    author = "A. Hasper and J. Holleman and J. Middelhoek",
    year = "1991",
    language = "English",
    isbn = "1-55899-112-3",
    series = "MRS Conference Proceedings",
    publisher = "Materials Research Society",
    pages = "317--325",
    editor = "Smith, {Gregory C.} and Roc Blumenthal",
    booktitle = "Tungsten and other advanced metals for VLSI applications in 1990",
    address = "United States",

    }

    Hasper, A, Holleman, J & Middelhoek, J 1991, Surface roughness improvements of Tungsten LPCVD. in GC Smith & R Blumenthal (eds), Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.. MRS Conference Proceedings, Materials Research Society, Pittsburg, PA, pp. 317-325, 7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990, Dallas, United States, 22/10/90.

    Surface roughness improvements of Tungsten LPCVD. / Hasper, A.; Holleman, J.; Middelhoek, J.

    Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.. ed. / Gregory C. Smith; Roc Blumenthal. Pittsburg, PA : Materials Research Society, 1991. p. 317-325 (MRS Conference Proceedings).

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademic

    TY - CHAP

    T1 - Surface roughness improvements of Tungsten LPCVD

    AU - Hasper, A.

    AU - Holleman, J.

    AU - Middelhoek, J.

    PY - 1991

    Y1 - 1991

    KW - METIS-112457

    M3 - Chapter

    SN - 1-55899-112-3

    T3 - MRS Conference Proceedings

    SP - 317

    EP - 325

    BT - Tungsten and other advanced metals for VLSI applications in 1990

    A2 - Smith, Gregory C.

    A2 - Blumenthal, Roc

    PB - Materials Research Society

    CY - Pittsburg, PA

    ER -

    Hasper A, Holleman J, Middelhoek J. Surface roughness improvements of Tungsten LPCVD. In Smith GC, Blumenthal R, editors, Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.. Pittsburg, PA: Materials Research Society. 1991. p. 317-325. (MRS Conference Proceedings).