Surface roughness improvements of Tungsten LPCVD

A. Hasper; J. Holleman; J. Middelhoek

Surface roughness improvements of Tungsten LPCVD

A. Hasper, J. Holleman, J. Middelhoek

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

Original language	English
Title of host publication	Tungsten and other advanced metals for VLSI applications in 1990
Subtitle of host publication	proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.
Editors	Gregory C. Smith, Roc Blumenthal
Place of Publication	Pittsburg, PA
Publisher	Materials Research Society
Pages	317-325
Number of pages	8
ISBN (Print)	1-55899-112-3
Publication status	Published - 1991
Event	7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990 - Dallas, United States Duration: 22 Oct 1990 → 24 Oct 1990 Conference number: 7

Publication series

Name	MRS Conference Proceedings
Publisher	Materials Research Society (MRS)
ISSN (Print)	0886-7860

Workshop

Workshop	7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990
Country/Territory	United States
City	Dallas
Period	22/10/90 → 24/10/90

Keywords

METIS-112457

Cite this

Hasper, A. ; Holleman, J. ; Middelhoek, J. / Surface roughness improvements of Tungsten LPCVD. Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.. editor / Gregory C. Smith ; Roc Blumenthal. Pittsburg, PA : Materials Research Society, 1991. pp. 317-325 (MRS Conference Proceedings).

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author = "A. Hasper and J. Holleman and J. Middelhoek",

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language = "English",

isbn = "1-55899-112-3",

series = "MRS Conference Proceedings",

publisher = "Materials Research Society",

pages = "317--325",

editor = "Smith, {Gregory C.} and Roc Blumenthal",

booktitle = "Tungsten and other advanced metals for VLSI applications in 1990",

address = "United States",

note = "7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990 ; Conference date: 22-10-1990 Through 24-10-1990",

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Hasper, A, Holleman, J & Middelhoek, J 1991, Surface roughness improvements of Tungsten LPCVD. in GC Smith & R Blumenthal (eds), Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.. MRS Conference Proceedings, Materials Research Society, Pittsburg, PA, pp. 317-325, 7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990, Dallas, Texas, United States, 22/10/90.

Surface roughness improvements of Tungsten LPCVD. / Hasper, A.; Holleman, J.; Middelhoek, J.
Tungsten and other advanced metals for VLSI applications in 1990: proceedings of the 1990 Workshop held October 22-24, 1990, Dallas, Texas, U.S.A.. ed. / Gregory C. Smith; Roc Blumenthal. Pittsburg, PA: Materials Research Society, 1991. p. 317-325 (MRS Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic

TY - CHAP

T1 - Surface roughness improvements of Tungsten LPCVD

AU - Hasper, A.

AU - Holleman, J.

AU - Middelhoek, J.

N1 - Conference code: 7

PY - 1991

Y1 - 1991

KW - METIS-112457

M3 - Chapter

SN - 1-55899-112-3

T3 - MRS Conference Proceedings

SP - 317

EP - 325

BT - Tungsten and other advanced metals for VLSI applications in 1990

A2 - Smith, Gregory C.

A2 - Blumenthal, Roc

PB - Materials Research Society

CY - Pittsburg, PA

T2 - 7th Workshop on Tungsten and Other Advanced Metals for ULSI Applications 1990

Y2 - 22 October 1990 through 24 October 1990

ER -