Abstract
A micro electromechanical switchable capacitor is disclosed, comprising a substrate, a bottom elecrode, a dielaectric layer deposited on at least part of sai bottum electrode, a conductive floating electrode deposited on at least part of said dielectric layer, an armature positioned proximate to the floating electrode and a first actiuation area in order to stabilize the down state position of the armature. The device may futhermore comprise a second actuation area. The present invention provides shunt switches and series switches with actuation in zones attached to the floating electrode area of with relay actuation.
Original language | English |
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Patent number | EP1398811 |
Priority date | 10/08/11 |
Publication status | Accepted/In press - 10 Aug 2011 |